Patent Assignment Details
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| Reel/Frame: | 028439/0630 | |
| Pages: | 2 |
| | Recorded: | 06/25/2012 | | |
| Attorney Dkt #: | 2237/LMRX-P213 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13423284
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Filing Dt:
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03/19/2012
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Publication #:
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Pub Dt:
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09/19/2013
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Title:
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METHODS AND APPARATUS FOR SELECTIVELY MODULATING AZIMUTHAL NON-UNIFORMITY IN A PLASMA PROCESSING SYSTEM
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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IPSG, P.C.
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P.O. BOX 700640
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SAN JOSE, CA 95170
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