Patent Assignment Details
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| Reel/Frame: | 028498/0951 | |
| Pages: | 5 |
| | Recorded: | 07/06/2012 | | |
| Attorney Dkt #: | 16431/ETCH/MASK-ETCH |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13455753
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Filing Dt:
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04/25/2012
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Publication #:
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Pub Dt:
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12/20/2012
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Title:
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METHODS AND APPARATUS FOR CONTROLLING PHOTORESIST LINE WIDTH ROUGHNESS WITH ENHANCED ELECTRON SPIN CONTROL
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PATTERSON & SHERIDAN, LLP
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595 SHREWSBURY AVENUE
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SHREWSBURY, NJ 07702
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