Patent Assignment Details
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| Reel/Frame: | 028620/0251 | |
| Pages: | 2 |
| | Recorded: | 07/19/2012 | | |
| Attorney Dkt #: | 153589 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/02/2014
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Application #:
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13536418
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Filing Dt:
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06/28/2012
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Publication #:
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Pub Dt:
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01/17/2013
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Title:
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TEMPERATURE DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignee
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| 14-1, SOTOKANDA 4-CHOME, CHIYODA-KU |
| TOKYO 1018980, JAPAN |
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Correspondence name and address
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JAMES A. OLIFF
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OLIFF & BERRIDGE, PLC
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P.O. BOX 320850
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ALEXANDRIA, VA 22320-4850
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