Patent Assignment Details
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| Reel/Frame: | 028701/0685 | |
| Pages: | 3 |
| | Recorded: | 08/01/2012 | | |
| Attorney Dkt #: | UNIT-01301US0 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/05/2016
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Application #:
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13564427
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Filing Dt:
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08/01/2012
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Publication #:
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Pub Dt:
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02/07/2013
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Title:
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CAPACITIVE-COUPLED PLASMA PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
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Assignee
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| 188 TAIHUA ROAD |
| JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA), PUDONG |
| SHANGHAI, CHINA 201201 |
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Correspondence name and address
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BURT MAGEN
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575 MARKET STREET, SUITE 2500
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SAN FRANCISCO, CA 94105
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