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Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:029529/0757   Pages: 12
Recorded: 12/21/2012
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 66
1
Patent #:
5498308
Issue Dt:
03/12/1996
Application #:
08202187
Filing Dt:
02/25/1994
Title:
PLASMA ASHER WITH MICROWAVE TRAP
2
Patent #:
6669995
Issue Dt:
12/30/2003
Application #:
08321672
Filing Dt:
10/12/1994
Title:
METHOD OF TREATING AN ANTI-REFLECTIVE COATING ON A SUBSTRATE
3
Patent #:
5791782
Issue Dt:
08/11/1998
Application #:
08531602
Filing Dt:
09/21/1995
Title:
CONTACT TEMPERATURE PROBE WITH UNRESTRAINED ORIENTATION
4
Patent #:
5961851
Issue Dt:
10/05/1999
Application #:
08626451
Filing Dt:
04/02/1996
Title:
MICROWAVE PLASMA DISCHARGE DEVICE
5
Patent #:
5980638
Issue Dt:
11/09/1999
Application #:
08790554
Filing Dt:
01/30/1997
Title:
DOUBLE WINDOW EXHAUST ARRANGEMENT FOR WAFER PLASMA PROCESSOR
6
Patent #:
6082374
Issue Dt:
07/04/2000
Application #:
08936548
Filing Dt:
09/24/1997
Title:
FLOURINE ASSISTED STRIPPING AND RESIDUE REMOVAL IN SAPPHIRE DOWNSTREAM PLASMA ASHER
7
Patent #:
6057645
Issue Dt:
05/02/2000
Application #:
09001635
Filing Dt:
12/31/1997
Title:
PLASMA DISCHARGE DEVICE AND METHOD WITH DYNAMIC TUNING
8
Patent #:
6228773
Issue Dt:
05/08/2001
Application #:
09060095
Filing Dt:
04/14/1998
Title:
SYNCHRONOUS MULTIPLEXED NEAR ZERO OVERHEAD ARCHITECTURE FOR VACUUM PROCESSES
9
Patent #:
6110288
Issue Dt:
08/29/2000
Application #:
09213925
Filing Dt:
12/17/1998
Title:
TEMPERATURE PROBE AND MEASUREMENT METHOD FOR LOW PRESSURE PROCESS
10
Patent #:
6040518
Issue Dt:
03/21/2000
Application #:
09218912
Filing Dt:
12/22/1998
Title:
WAFER TEMPERATURE MONITORING DEVICE UTILIZING FLEXIBLE THERMOCOUPLE
11
Patent #:
6273956
Issue Dt:
08/14/2001
Application #:
09314193
Filing Dt:
05/19/1999
Title:
SYNCHRONOUS MULTIPLEXED NEAR ZERO OVERHEAD ARCHITECTURE FOR VACUUM PROCESSES
12
Patent #:
6281135
Issue Dt:
08/28/2001
Application #:
09368553
Filing Dt:
08/05/1999
Title:
OXYGEN FREE PLASMA STRIPPING PROCESS
13
Patent #:
6492186
Issue Dt:
12/10/2002
Application #:
09434617
Filing Dt:
11/05/1999
Title:
METHOD FOR DETECTING AN ENDPOINT FOR AN OXYGEN FREE PLASMA PROCESS
14
Patent #:
6547458
Issue Dt:
04/15/2003
Application #:
09449338
Filing Dt:
11/24/1999
Title:
OPTIMIZED OPTICAL SYSTEM DESIGN FOR ENDPOINT DETECTION
15
Patent #:
6225745
Issue Dt:
05/01/2001
Application #:
09466999
Filing Dt:
12/17/1999
Title:
DUAL PLASMA SOURCE FOR PLASMA PROCESS CHAMBER
16
Patent #:
6332709
Issue Dt:
12/25/2001
Application #:
09495704
Filing Dt:
02/01/2000
Title:
Contact temperature probe with thermal isolation
17
Patent #:
6734120
Issue Dt:
05/11/2004
Application #:
09505695
Filing Dt:
02/17/2000
Title:
METHOD OF PHOTORESIST ASH RESIDUE REMOVAL
18
Patent #:
6406836
Issue Dt:
06/18/2002
Application #:
09531885
Filing Dt:
03/21/2000
Title:
METHOD OF STRIPPING PHOTORESIST USING RE-COATING MATERIAL
19
Patent #:
6263830
Issue Dt:
07/24/2001
Application #:
09546750
Filing Dt:
04/11/2000
Title:
MICROWAVE CHOKE FOR REMOTE PLASMA GENERATOR
20
Patent #:
6537419
Issue Dt:
03/25/2003
Application #:
09558606
Filing Dt:
04/26/2000
Title:
GAS DISTRIBUTION PLATE ASSEMBLY FOR PROVIDING LAMINAR GAS FLOW ACROSS THE SURFACE OF A SUBSTRATE
21
Patent #:
6635117
Issue Dt:
10/21/2003
Application #:
09560538
Filing Dt:
04/26/2000
Title:
ACTIVELY-COOLED DISTRIBUTION PLATE FOR REDUCING REACTIVE GAS TEMPERATURE IN A PLASMA PROCESSING SYSTEM
22
Patent #:
6499777
Issue Dt:
12/31/2002
Application #:
09565833
Filing Dt:
05/05/2000
Title:
END-EFFECTOR WITH INTEGRATED COOLING MECHANISM
23
Patent #:
6461801
Issue Dt:
10/08/2002
Application #:
09579943
Filing Dt:
05/26/2000
Title:
RAPID HEATING AND COOLING OF WORKPIECE CHUCKS
24
Patent #:
6503366
Issue Dt:
01/07/2003
Application #:
09732064
Filing Dt:
12/07/2000
Publication #:
US20020069828
Pub Dt:
06/13/2002
Title:
CHEMICAL PLASMA CATHODE
25
Patent #:
6524936
Issue Dt:
02/25/2003
Application #:
09742721
Filing Dt:
12/22/2000
Publication #:
US20020151156
Pub Dt:
10/17/2002
Title:
PROCESS FOR REMOVAL OF PHOTORESIST AFTER ION IMPLANTATION
26
Patent #:
6439155
Issue Dt:
08/27/2002
Application #:
09747452
Filing Dt:
12/22/2000
Publication #:
US20020112819
Pub Dt:
08/22/2002
Title:
REMOTE PLASMA GENERATOR WITH SLIDING SHORT TUNER
27
Patent #:
6352050
Issue Dt:
03/05/2002
Application #:
09747822
Filing Dt:
12/22/2000
Publication #:
US20020011214
Pub Dt:
01/31/2002
Title:
Remote plasma mixer
28
Patent #:
6412438
Issue Dt:
07/02/2002
Application #:
09748060
Filing Dt:
12/22/2000
Publication #:
US20020011310
Pub Dt:
01/31/2002
Title:
DOWNSTREAM SAPPHIRE ELBOW JOINT FOR REMOTE PLASMA GENERATOR
29
Patent #:
6409932
Issue Dt:
06/25/2002
Application #:
09749648
Filing Dt:
12/27/2000
Publication #:
US20010047979
Pub Dt:
12/06/2001
Title:
METHOD AND APPARATUS FOR INCREASED WORKPIECE THROUGHPUT
30
Patent #:
6630406
Issue Dt:
10/07/2003
Application #:
09855177
Filing Dt:
05/14/2001
Publication #:
US20030032300
Pub Dt:
02/13/2003
Title:
PLASMA ASHING PROCESS
31
Patent #:
6834656
Issue Dt:
12/28/2004
Application #:
09864003
Filing Dt:
05/23/2001
Publication #:
US20020185151
Pub Dt:
12/12/2002
Title:
PLASMA PROCESS FOR REMOVING POLYMER AND RESIDUES FROM SUBSTRATES
32
Patent #:
6638875
Issue Dt:
10/28/2003
Application #:
09876318
Filing Dt:
06/07/2001
Publication #:
US20010027016
Pub Dt:
10/04/2001
Title:
OXYGEN FREE PLASMA STRIPPING PROCESS
33
Patent #:
6585908
Issue Dt:
07/01/2003
Application #:
09905032
Filing Dt:
07/13/2001
Publication #:
US20030062337
Pub Dt:
04/03/2003
Title:
SHALLOW ANGLE INTERFERENCE PROCESS AND APPARATUS FOR DETERMINING REAL-TIME ETCHING RATE
34
Patent #:
6761796
Issue Dt:
07/13/2004
Application #:
09905043
Filing Dt:
07/13/2001
Publication #:
US20020144785
Pub Dt:
10/10/2002
Title:
METHOD AND APPARATUS FOR MICRO-JET ENABLED, LOW-ENERGY ION GENERATION AND TRANSPORT IN PLASMA PROCESSING
35
Patent #:
6548416
Issue Dt:
04/15/2003
Application #:
09911682
Filing Dt:
07/24/2001
Publication #:
US20030022511
Pub Dt:
01/30/2003
Title:
PLASMA ASHING PROCESS
36
Patent #:
6897615
Issue Dt:
05/24/2005
Application #:
10004523
Filing Dt:
11/01/2001
Publication #:
US20020135308
Pub Dt:
09/26/2002
Title:
PLASMA PROCESS AND APPARATUS
37
Patent #:
7163587
Issue Dt:
01/16/2007
Application #:
10071908
Filing Dt:
02/08/2002
Publication #:
US20030150560
Pub Dt:
08/14/2003
Title:
REACTOR ASSEMBLY AND PROCESSING METHOD
38
Patent #:
6605226
Issue Dt:
08/12/2003
Application #:
10170621
Filing Dt:
06/10/2002
Publication #:
US20020151184
Pub Dt:
10/17/2002
Title:
METHOD FOR INCREASED WORKPIECE THROUGHPUT
39
Patent #:
6660975
Issue Dt:
12/09/2003
Application #:
10223226
Filing Dt:
08/16/2002
Publication #:
US20020195440
Pub Dt:
12/26/2002
Title:
METHOD FOR PRODUCING FLAT WAFER CHUCKS
40
Patent #:
7078161
Issue Dt:
07/18/2006
Application #:
10248707
Filing Dt:
02/11/2003
Publication #:
US20040157170
Pub Dt:
08/12/2004
Title:
PLASMA ASHING PROCESS FOR REMOVING PHOTORESIST AND RESIDUES DURING FERROELECTRIC DEVICE FABRICATION
41
Patent #:
8580076
Issue Dt:
11/12/2013
Application #:
10249962
Filing Dt:
05/22/2003
Publication #:
US20040238123
Pub Dt:
12/02/2004
Title:
PLASMA APPARATUS, GAS DISTRIBUTION ASSEMBLY FOR A PLASMA APPARATUS AND PROCESSES THEREWITH
42
Patent #:
6673197
Issue Dt:
01/06/2004
Application #:
10336270
Filing Dt:
01/03/2003
Publication #:
US20030102085
Pub Dt:
06/05/2003
Title:
CHEMICAL PLASMA CATHODE
43
Patent #:
6782843
Issue Dt:
08/31/2004
Application #:
10404510
Filing Dt:
04/01/2003
Publication #:
US20030205328
Pub Dt:
11/06/2003
Title:
ACTIVELY-COOLED DISTRIBUTION PLATE FOR REDUCING REACTIVE GAS TEMPERATURE IN A PLASMA PROCESSING SYSTEM
44
Patent #:
6951823
Issue Dt:
10/04/2005
Application #:
10638570
Filing Dt:
08/11/2003
Publication #:
US20040084412
Pub Dt:
05/06/2004
Title:
PLASMA ASHING PROCESS
45
Patent #:
7794663
Issue Dt:
09/14/2010
Application #:
10708251
Filing Dt:
02/19/2004
Publication #:
US20050186680
Pub Dt:
08/25/2005
Title:
METHOD AND SYSTEM FOR DETECTION OF SOLID MATERIALS IN A PLASMA USING AN ELECTROMAGNETIC CIRCUIT
46
Patent #:
7037846
Issue Dt:
05/02/2006
Application #:
10752906
Filing Dt:
01/06/2004
Publication #:
US20040140053
Pub Dt:
07/22/2004
Title:
METHOD AND APPARATUS FOR MICRO-JET ENABLED, LOW-ENERGY ION GENERATION AND TRANSPORT IN PLASMA PROCESSING
47
Patent #:
7892357
Issue Dt:
02/22/2011
Application #:
10755617
Filing Dt:
01/12/2004
Publication #:
US20050150601
Pub Dt:
07/14/2005
Title:
GAS DISTRIBUTION PLATE ASSEMBLY FOR PLASMA REACTORS
48
Patent #:
7183514
Issue Dt:
02/27/2007
Application #:
10766973
Filing Dt:
01/29/2004
Publication #:
US20040182834
Pub Dt:
09/23/2004
Title:
HELIX COUPLED REMOTE PLASMA SOURCE
49
Patent #:
NONE
Issue Dt:
Application #:
10836516
Filing Dt:
04/30/2004
Publication #:
US20050241767
Pub Dt:
11/03/2005
Title:
Multi-piece baffle plate assembly for a plasma processing system
50
Patent #:
7338575
Issue Dt:
03/04/2008
Application #:
10937946
Filing Dt:
09/10/2004
Publication #:
US20060054281
Pub Dt:
03/16/2006
Title:
HYDROCARBON DIELECTRIC HEAT TRANSFER FLUIDS FOR MICROWAVE PLASMA GENERATORS
51
Patent #:
7821655
Issue Dt:
10/26/2010
Application #:
11053731
Filing Dt:
02/08/2005
Publication #:
US20060082785
Pub Dt:
04/20/2006
Title:
IN-SITU ABSOLUTE MEASUREMENT PROCESS AND APPARATUS FOR FILM THICKNESS, FILM REMOVAL RATE, AND REMOVAL ENDPOINT PREDICTION
52
Patent #:
7449416
Issue Dt:
11/11/2008
Application #:
11217247
Filing Dt:
09/01/2005
Publication #:
US20060046470
Pub Dt:
03/02/2006
Title:
APPARATUS AND PLASMA ASHING PROCESS FOR INCREASING PHOTORESIST REMOVAL RATE
53
Patent #:
7381651
Issue Dt:
06/03/2008
Application #:
11386327
Filing Dt:
03/22/2006
Publication #:
US20070221620
Pub Dt:
09/27/2007
Title:
PROCESSES FOR MONITORING THE LEVELS OF OXYGEN AND/OR NITROGEN SPECIES IN A SUBSTANTIALLY OXYGEN AND NITROGEN-FREE PLASMA ASHING PROCESS
54
Patent #:
7845310
Issue Dt:
12/07/2010
Application #:
11635227
Filing Dt:
12/06/2006
Publication #:
US20080138992
Pub Dt:
06/12/2008
Title:
WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE SUBSTRATES
55
Patent #:
NONE
Issue Dt:
Application #:
12275394
Filing Dt:
11/21/2008
Publication #:
US20100130017
Pub Dt:
05/27/2010
Title:
FRONT END OF LINE PLASMA MEDIATED ASHING PROCESSES AND APPARATUS
56
Patent #:
NONE
Issue Dt:
Application #:
12398390
Filing Dt:
03/05/2009
Publication #:
US20090277871
Pub Dt:
11/12/2009
Title:
PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTECTIVE LAYER BEFORE AND/OR DURING THE PLASMA MEDIATED ASHING PROCESS
57
Patent #:
8268181
Issue Dt:
09/18/2012
Application #:
12552316
Filing Dt:
09/02/2009
Publication #:
US20100055807
Pub Dt:
03/04/2010
Title:
PLASMA ASHING APPARATUS AND ENDPOINT DETECTION PROCESS
58
Patent #:
8268181
Issue Dt:
09/18/2012
Application #:
12552316
Filing Dt:
09/02/2009
Publication #:
US20100055807
Pub Dt:
03/04/2010
Title:
PLASMA ASHING APPARATUS AND ENDPOINT DETECTION PROCESS
59
Patent #:
8906195
Issue Dt:
12/09/2014
Application #:
12621136
Filing Dt:
11/18/2009
Publication #:
US20110114115
Pub Dt:
05/19/2011
Title:
TUNING HARDWARE FOR PLASMA ASHING APPARATUS AND METHODS OF USE THEREOF
60
Patent #:
NONE
Issue Dt:
Application #:
12631117
Filing Dt:
12/04/2009
Publication #:
US20110136346
Pub Dt:
06/09/2011
Title:
Substantially Non-Oxidizing Plasma Treatment Devices and Processes
61
Patent #:
NONE
Issue Dt:
Application #:
12694597
Filing Dt:
01/27/2010
Publication #:
US20110180097
Pub Dt:
07/28/2011
Title:
THERMAL ISOLATION ASSEMBLIES FOR WAFER TRANSPORT APPARATUS AND METHODS OF USE THEREOF
62
Patent #:
8119413
Issue Dt:
02/21/2012
Application #:
12843175
Filing Dt:
07/26/2010
Publication #:
US20100289510
Pub Dt:
11/18/2010
Title:
METHOD AND SYSTEM FOR DETECTION OF SOLID MATERIALS IN A PLASMA USING AN ELECTROMAGNETIC CIRCUIT
63
Patent #:
NONE
Issue Dt:
Application #:
12844193
Filing Dt:
07/27/2010
Publication #:
US20120024314
Pub Dt:
02/02/2012
Title:
PLASMA MEDIATED ASHING PROCESSES
64
Patent #:
NONE
Issue Dt:
Application #:
12910096
Filing Dt:
10/22/2010
Publication #:
US20110036500
Pub Dt:
02/17/2011
Title:
WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE SUBSTRATES
65
Patent #:
9129778
Issue Dt:
09/08/2015
Application #:
13051713
Filing Dt:
03/18/2011
Publication #:
US20120237696
Pub Dt:
09/20/2012
Title:
FLUID DISTRIBUTION MEMBERS AND/OR ASSEMBLIES
66
Patent #:
NONE
Issue Dt:
Application #:
13117488
Filing Dt:
05/27/2011
Publication #:
US20110226280
Pub Dt:
09/22/2011
Title:
PLASMA MEDIATED ASHING PROCESSES
Assignor
1
AXCELIS TECHNOLOGIES, INC.
Exec Dt:
12/03/2012
Assignee
1
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondence name and address
HARNESS, DICKEY & PIERCE, P.L.C.
P.O. BOX 828
BLOOMFIELD HILLS, MI 48303

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