Patent Assignment Details
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| Reel/Frame: | 029674/0348 | |
| Pages: | 9 |
| | Recorded: | 01/22/2013 | | |
| Attorney Dkt #: | 155821 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/26/2014
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Application #:
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13708348
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Filing Dt:
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12/07/2012
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Publication #:
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Pub Dt:
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06/13/2013
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Assignees
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| 14-1, SOTOKANDA 4-CHOME |
| CHIYODA-KU, TOKYO 101-8980, JAPAN |
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| 75, QUAI D'ORSAY |
| F-75007, PARIS, FRANCE |
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Correspondence name and address
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JAMES A. OLIFF
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OLIFF & BERRIDGE, PLC
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P.O. BOX 320850
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ALEXANDRIA, VA 22320-4850
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