Patent Assignment Details
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| Reel/Frame: | 029685/0598 | |
| Pages: | 3 |
| | Recorded: | 01/24/2013 | | |
| Attorney Dkt #: | 1022.0022C |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13687709
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Filing Dt:
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11/28/2012
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Publication #:
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Pub Dt:
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05/30/2013
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Title:
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Exhaust unit and substrate processing apparatus
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Assignee
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| 14-1, SOTOKANDA 4-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN 1018980 |
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Correspondence name and address
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PATRICK J. FINNAN
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9801 WASHINGTONIAN BLVD.
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SUITE 750
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GAITHERSBURG, MD 20878
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