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Reel/Frame:029727/0789   Pages: 10
Recorded: 01/31/2013
Attorney Dkt #:APPM/13884 D1 KT/AMD
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/16/2013
Application #:
13652814
Filing Dt:
10/16/2012
Publication #:
Pub Dt:
02/14/2013
Title:
APPARATUS FOR EFFICIENT REMOVAL OF HALOGEN RESIDUES FROM ETCHED SUBSTRATES
Assignors
1
Exec Dt:
01/08/2010
2
Exec Dt:
01/02/2010
3
Exec Dt:
02/02/2010
4
Exec Dt:
01/07/2010
Assignee
1
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
PATTERSON & SHERIDAN, LLP
595 SHREWSBURY AVENUE
SUITE 100
SHREWSBURY, NJ 07702

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