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Patent Assignment Details

NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Total properties: 12

Patent #:	5315793	Issue Dt:	05/31/1994	Application #:	07769894	Filing Dt:	10/01/1991
Title:	SYSTEM FOR PRECISION CLEANING BY JET SPRAY

Patent #:	5409418	Issue Dt:	04/25/1995	Application #:	07952126	Filing Dt:	09/28/1992
Title:	ELECTROSTATIC DISCHARGE CONTROL DURING JET SPRAY

Patent #:	5316560	Issue Dt:	05/31/1994	Application #:	08033906	Filing Dt:	03/19/1993
Title:	ENVIRONMENT CONTROL APPARATUS

Patent #:	5354384	Issue Dt:	10/11/1994	Application #:	08056684	Filing Dt:	04/30/1993
Title:	METHOD FOR CLEANING SURFACE BY HEATING AND A STREAM OF SNOW

Patent #:	5806544	Issue Dt:	09/15/1998	Application #:	08799679	Filing Dt:	02/11/1997
Title:	CARBON DIOXIDE JET SPRAY DISK CLEANING SYSTEM

Patent #:	6295332	Issue Dt:	09/25/2001	Application #:	09332206	Filing Dt:	06/12/1999
Title:	METHOD OF IMPROVING X-RAY LITHOGRAPHY IN THE SUB 100NM RANGE TO CREATE HIGH QUALITY SEMICONDUCTOR DEVICES

Patent #:	6845145	Issue Dt:	01/18/2005	Application #:	09876443	Filing Dt:	06/07/2001
Publication #:	US20010026606	Pub Dt:	10/04/2001
Title:	METHOD OF IMPROVING X-RAY LITHOGRAPHY IN THE SUB 100NM RANGE TO CREATE HIGH QUALITY SEMICONDUCTOR DEVICES

Patent #:	NONE	Issue Dt:		Application #:	11793647	Filing Dt:	01/12/2009
Publication #:	US20090126760	Pub Dt:	05/21/2009
Title:	SYSTEM FOR CLEANING A SURFACE USING CRYOGENIC AEROSOL AND FLUID REACTANT

Patent #:	NONE	Issue Dt:		Application #:	12261157	Filing Dt:	10/30/2008
Publication #:	US20090107526	Pub Dt:	04/30/2009
Title:	CO2 SYSTEM FOR POLYMER FILM CLEANING

Patent #:	NONE	Issue Dt:		Application #:	13284078	Filing Dt:	10/28/2011
Publication #:	US20120279519	Pub Dt:	11/08/2012
Title:	Integrated Substrate Cleaning System and Method

Patent #:	D451937	Issue Dt:	12/11/2001	Application #:	29105130	Filing Dt:	05/18/1999
Title:	VERTICAL STEPPER STAGE APPARATUS

Assignor

Exec Dt:

09/01/2011

Assignee

55 ALMADEN BOULEVARD, SUITE 100

SAN JOSE, CALIFORNIA 95113

Correspondence name and address
	DLA PIPER LLP (US)
	4365 EXECUTIVE DRIVE, SUITE 1100
	SAN DIEGO, CA 92121

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