Patent Assignment Details
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Reel/Frame: | 029779/0074 | |
| Pages: | 3 |
| | Recorded: | 02/08/2013 | | |
Attorney Dkt #: | 1015292-000707 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13671255
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Filing Dt:
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11/07/2012
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Publication #:
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Pub Dt:
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05/23/2013
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Title:
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TEMPERATURE CONTROL MODULES FOR SHOWERHEAD ELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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BUCHANAN INGERSOLL & ROONEY PC
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1737 KING STREET
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SUITE 500
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ALEXANDRIA, VA 22314
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