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Reel/Frame:029872/0942   Pages: 6
Recorded: 02/26/2013
Attorney Dkt #:2550/E25
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
12/03/2013
Application #:
13775335
Filing Dt:
02/25/2013
Publication #:
Pub Dt:
07/04/2013
Title:
DETECTION AND MITIGATION OF PARTICLE CONTAMINANTS IN MEMS DEVICES
Assignors
1
Exec Dt:
01/18/2011
2
Exec Dt:
01/25/2011
3
Exec Dt:
01/18/2011
4
Exec Dt:
01/20/2011
5
Exec Dt:
01/18/2011
Assignee
1
ONE TECHNOLOGY WAY
NORWOOD, MASSACHUSETTS 02062-9106
Correspondence name and address
JEFFREY T. KLAYMAN
SUNSTEIN KANN MURPHY & TIMBERS LLP
125 SUMMER STREET
BOSTON, MA 02110-1618

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