Patent Assignment Details
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| Reel/Frame: | 029913/0786 | |
| Pages: | 5 |
| | Recorded: | 03/04/2013 | | |
| Attorney Dkt #: | 4030-0304US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/24/2015
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Application #:
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13783624
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Filing Dt:
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03/04/2013
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Publication #:
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Pub Dt:
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09/12/2013
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Title:
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PROCESS MONITORING DEVICE AND PROCESS MONITORING METHOD IN SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignee
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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ROTHWELL, FIGG, ERNST & MANBECK, P.C.
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607 14TH STREET, N.W.
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SUITE 800
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WASHINGTON, DC 20005
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