Total properties:
34
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Patent #:
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Issue Dt:
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08/04/1998
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Application #:
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08612214
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Filing Dt:
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03/07/1996
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Title:
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MANUFACTURING METHOD OF A SILICON WAFER HAVING A CONTROLLED BMD CONCENTRATION
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Patent #:
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Issue Dt:
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05/23/2000
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Application #:
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08781026
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Filing Dt:
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01/09/1997
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Title:
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HYDROGEN HEAT TREATMENT METHOD OF SILICON WAFERS USING A HIGH-PURITY INERT SUBSTITUTION GAS
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Patent #:
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Issue Dt:
|
05/09/2000
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Application #:
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08991407
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Filing Dt:
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12/16/1997
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Title:
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VAPOR DEPOSITION APPARATUS AND METHOD FOR FORMING THIN FILM
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Patent #:
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Issue Dt:
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04/25/2000
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Application #:
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09006996
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Filing Dt:
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01/14/1998
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Title:
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METHOD OF AND APPARATUS FOR REMOVING METALLIC IMPURITIES DIFFUSED IN A SEMICONDUCTOR SUBSTRATE
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Patent #:
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Issue Dt:
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09/05/2000
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Application #:
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09137298
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Filing Dt:
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08/20/1998
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Title:
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HIGH-SPEED ROTATIONAL VAPOR DEPOSITION APPARATUS AND HIGH-SPEED ROTATIONAL VAPOR DEPOSITION THIN FILM FORMING METHOD
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Patent #:
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Issue Dt:
|
10/12/1999
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Application #:
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09187038
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Filing Dt:
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11/06/1998
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Title:
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METHOD FOR MAKING A SLANT-SURFACE SILICON WAFER HAVING A RECONSTRUCTED ATOMIC-LEVEL STEPPED SURFACE STRUCTURE
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Patent #:
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Issue Dt:
|
06/26/2001
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Application #:
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09556943
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Filing Dt:
|
04/21/2000
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Title:
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Wafer heating device and method of controlling the same
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Patent #:
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Issue Dt:
|
05/11/2004
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Application #:
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09589087
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Filing Dt:
|
06/08/2000
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Title:
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WAFER DEFECT MEASURING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
|
10/08/2002
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Application #:
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09729669
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Filing Dt:
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12/05/2000
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Publication #:
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Pub Dt:
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09/13/2001
| | | | |
Title:
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METHOD AND APPARATUS FOR CONTROLLING RISE AND FALL OF TEMPERATURE IN SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
|
02/11/2003
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Application #:
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09798980
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Filing Dt:
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03/06/2001
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Publication #:
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Pub Dt:
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10/04/2001
| | | | |
Title:
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POLISHING APPARATUS AND METHOD THEREOF
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Patent #:
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Issue Dt:
|
05/20/2003
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Application #:
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09883955
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Filing Dt:
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06/20/2001
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Publication #:
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Pub Dt:
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12/27/2001
| | | | |
Title:
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SINGLE CRYSTAL PULLING APPARATUS AND PULLING METHOD
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Patent #:
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Issue Dt:
|
03/25/2003
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Application #:
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09921893
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Filing Dt:
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08/06/2001
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Publication #:
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Pub Dt:
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04/18/2002
| | | | |
Title:
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METHOD OF CHEMICALLY GROWING A THIN FILM IN A GAS PHASE ON A SILICON SEMICONDUCTOR SUBSTRATE
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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10633487
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Filing Dt:
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08/04/2003
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Publication #:
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Pub Dt:
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11/24/2005
| | | | |
Title:
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APPARATUS FOR PULLING A SINGLE CRYSTAL
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|
|
Patent #:
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|
Issue Dt:
|
06/05/2007
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Application #:
|
10645911
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Filing Dt:
|
08/22/2003
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Publication #:
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|
Pub Dt:
|
03/11/2004
| | | | |
Title:
|
SILICON WAFER CLEANING METHOD
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|
|
Patent #:
|
|
Issue Dt:
|
08/01/2006
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Application #:
|
10921303
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Filing Dt:
|
08/19/2004
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Publication #:
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|
Pub Dt:
|
04/14/2005
| | | | |
Title:
|
SILICON SEED CRYSTAL AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL
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|
|
Patent #:
|
|
Issue Dt:
|
05/23/2006
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Application #:
|
10941993
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Filing Dt:
|
09/16/2004
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Publication #:
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|
Pub Dt:
|
02/24/2005
| | | | |
Title:
|
SILICON SINGLE CRYSTAL WAFER FABRICATING METHOD AND SILICON SINGLE CRYSTAL WAFER
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|
|
Patent #:
|
|
Issue Dt:
|
12/20/2005
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Application #:
|
11001047
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Filing Dt:
|
12/02/2004
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Publication #:
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|
Pub Dt:
|
06/09/2005
| | | | |
Title:
|
POLISHING HEAD AND POLISHING APPARATUS
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|
|
Patent #:
|
|
Issue Dt:
|
03/20/2007
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Application #:
|
11002995
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Filing Dt:
|
12/03/2004
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Publication #:
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|
Pub Dt:
|
06/08/2006
| | | | |
Title:
|
A SEMICONDUCTOR SUBSTRATE COMPRISING A SUPPORT SUBSTRATE WHICH COMPRISES A GETTERING SITE
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|
|
Patent #:
|
|
Issue Dt:
|
07/24/2007
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Application #:
|
11038180
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Filing Dt:
|
01/21/2005
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Publication #:
|
|
Pub Dt:
|
08/04/2005
| | | | |
Title:
|
MANUFACTURING METHOD FOR STRAINED SILICON WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
11/06/2007
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Application #:
|
11206855
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Filing Dt:
|
08/19/2005
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Publication #:
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|
Pub Dt:
|
03/23/2006
| | | | |
Title:
|
PROCESS OF PRODUCING SILICON WAFER
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|
|
Patent #:
|
|
Issue Dt:
|
05/20/2008
|
Application #:
|
11518514
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Filing Dt:
|
09/11/2006
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Publication #:
|
|
Pub Dt:
|
03/15/2007
| | | | |
Title:
|
METHOD OF MANUFACTURING SILICON WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
07/22/2008
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Application #:
|
11754417
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Filing Dt:
|
05/29/2007
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Publication #:
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|
Pub Dt:
|
09/27/2007
| | | | |
Title:
|
SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD
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|
|
Patent #:
|
|
Issue Dt:
|
03/16/2010
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Application #:
|
11908554
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Filing Dt:
|
09/13/2007
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Publication #:
|
|
Pub Dt:
|
03/12/2009
| | | | |
Title:
|
SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD FOR STRAINED SILICON WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
09/15/2009
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Application #:
|
12021828
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Filing Dt:
|
01/29/2008
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Publication #:
|
|
Pub Dt:
|
08/07/2008
| | | | |
Title:
|
SINGLE CRYSTAL PULLING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/12/2011
|
Application #:
|
12512229
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Filing Dt:
|
07/30/2009
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Publication #:
|
|
Pub Dt:
|
03/04/2010
| | | | |
Title:
|
MANUFACTURING METHOD FOR SILICON WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
07/02/2013
|
Application #:
|
12512492
|
Filing Dt:
|
07/30/2009
|
Publication #:
|
|
Pub Dt:
|
02/18/2010
| | | | |
Title:
|
METHOD OF MANUFACTURING SINGLE CRYSTAL SILICON WAFER FROM INGOT GROWN BY CZOCHARLSKI PROCESS WITH RAPID HEATING/COOLING PROCESS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/10/2012
|
Application #:
|
12560847
|
Filing Dt:
|
09/16/2009
|
Publication #:
|
|
Pub Dt:
|
04/15/2010
| | | | |
Title:
|
METHOD FOR PRODUCTION OF SILICON WAFER FOR EPITAXIAL SUBSTRATE AND METHOD FOR PRODUCTION OF EPITAXIAL SUBSTRATE
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|
|
Patent #:
|
|
Issue Dt:
|
08/28/2012
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Application #:
|
12656232
|
Filing Dt:
|
01/21/2010
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Publication #:
|
|
Pub Dt:
|
08/05/2010
| | | | |
Title:
|
METHOD OF HEAT TREATING SILICON WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
02/04/2014
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Application #:
|
12940754
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Filing Dt:
|
11/05/2010
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Publication #:
|
|
Pub Dt:
|
03/03/2011
| | | | |
Title:
|
SILICON WAFER
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
13036196
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Filing Dt:
|
02/28/2011
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Publication #:
|
|
Pub Dt:
|
09/08/2011
| | | | |
Title:
|
METHOD OF PULLING UP SILICON SINGLE CRYSTAL
|
|
|
Patent #:
|
|
Issue Dt:
|
01/20/2015
|
Application #:
|
13137812
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Filing Dt:
|
09/14/2011
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Publication #:
|
|
Pub Dt:
|
03/22/2012
| | | | |
Title:
|
SINGLE CRYSTAL PULLING-UP APPARATUS OF PULLING-UP SILICON SINGLE CRYSTAL AND SINGLE CRYSTAL PULLING-UP METHOD OF PULLING-UP SILICON SINGLE CRYSTAL
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|
|
Patent #:
|
|
Issue Dt:
|
04/07/2015
|
Application #:
|
13322080
|
Filing Dt:
|
02/16/2012
|
Publication #:
|
|
Pub Dt:
|
06/07/2012
| | | | |
Title:
|
SILICON WAFER AND METHOD FOR HEAT-TREATING SILICON WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
03/19/2013
|
Application #:
|
13387125
|
Filing Dt:
|
04/05/2012
|
Publication #:
|
|
Pub Dt:
|
07/19/2012
| | | | |
Title:
|
METHOD FOR HEAT TREATING A SILICON WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
06/16/2015
|
Application #:
|
13421748
|
Filing Dt:
|
03/15/2012
|
Publication #:
|
|
Pub Dt:
|
09/27/2012
| | | | |
Title:
|
THERMAL TREATMENT METHOD OF SILICON WAFER AND SILICON WAFER
|
|