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Reel/Frame:030157/0772   Pages: 23
Recorded: 04/05/2013
Attorney Dkt #:T22257-156576
Conveyance: SECURITY AGREEMENT
Total properties: 34
1
Patent #:
4584045
Issue Dt:
04/22/1986
Application #:
06581856
Filing Dt:
02/21/1984
Title:
APPARATUS FOR CONVEYING A SEMICONDUCTOR WAFER
2
Patent #:
6071822
Issue Dt:
06/06/2000
Application #:
09127762
Filing Dt:
07/31/1998
Title:
ETCHING PROCESS FOR PRODUCING SUBSTANTIALLY UNDERCUT FREE SILICON ON INSULATOR STRUCTURES
3
Patent #:
6417013
Issue Dt:
07/09/2002
Application #:
09239723
Filing Dt:
01/29/1999
Title:
MORPHED PROCESSING OF SEMICONDUCTOR DEVICES
4
Patent #:
6258217
Issue Dt:
07/10/2001
Application #:
09406853
Filing Dt:
09/29/1999
Title:
ROTATING MAGNET ARRAY AND SPUTTER SOURCE
5
Patent #:
6540928
Issue Dt:
04/01/2003
Application #:
09658023
Filing Dt:
09/08/2000
Title:
MAGNETIC POLE FABRICATION PROCESS AND DEVICE
6
Patent #:
6547975
Issue Dt:
04/15/2003
Application #:
09696739
Filing Dt:
10/26/2000
Title:
MAGNETIC POLE FABRICATION PROCESS AND DEVICE
7
Patent #:
6605519
Issue Dt:
08/12/2003
Application #:
09846214
Filing Dt:
05/02/2001
Publication #:
US20020164884
Pub Dt:
11/07/2002
Title:
METHOD FOR THIN FILM LIFT-OFF PROCESSES USING LATERAL EXTENDED ETCHING MASKS AND DEVICE
8
Patent #:
6544696
Issue Dt:
04/08/2003
Application #:
09996748
Filing Dt:
11/30/2001
Publication #:
US20020068229
Pub Dt:
06/06/2002
Title:
EMBEDDED ATTENUATED PHASE SHIFT MASK AND METHOD OF MAKING EMBEDDED ATTENUATED PHASE SHIFT MASK
9
Patent #:
6771482
Issue Dt:
08/03/2004
Application #:
10163567
Filing Dt:
06/06/2002
Publication #:
US20030021077
Pub Dt:
01/30/2003
Title:
PERIMETER SEAL FOR BACKSIDE COOLING OF SUBSTRATES
10
Patent #:
6846747
Issue Dt:
01/25/2005
Application #:
10407831
Filing Dt:
04/04/2003
Publication #:
US20030216034
Pub Dt:
11/20/2003
Title:
METHOD FOR ETCHING VIAS
11
Patent #:
6905626
Issue Dt:
06/14/2005
Application #:
10601076
Filing Dt:
06/19/2003
Publication #:
US20040055995
Pub Dt:
03/25/2004
Title:
NOTCH-FREE ETCHING OF HIGH ASPECT SOI STRUCTURES USING ALTERNATING DEPOSITION AND ETCHING AND PULSED PLASMA
12
Patent #:
6982175
Issue Dt:
01/03/2006
Application #:
10770839
Filing Dt:
02/02/2004
Publication #:
US20040175913
Pub Dt:
09/09/2004
Title:
END POINT DETECTION IN TIME DIVISION MULTIPLEXED ETCH PROCESSES
13
Patent #:
7115520
Issue Dt:
10/03/2006
Application #:
10815965
Filing Dt:
03/31/2004
Publication #:
US20040235307
Pub Dt:
11/25/2004
Title:
METHOD AND APPARATUS FOR PROCESS CONTROL IN TIME DIVISION MULTIPLEXED (TDM) ETCH PROCESS
14
Patent #:
7008877
Issue Dt:
03/07/2006
Application #:
10839809
Filing Dt:
05/03/2004
Publication #:
US20040259367
Pub Dt:
12/23/2004
Title:
ETCHING OF CHROMIUM LAYERS ON PHOTOMASKS UTILIZING HIGH DENSITY PLASMA AND LOW FREQUENCY RF BIAS
15
Patent #:
7101805
Issue Dt:
09/05/2006
Application #:
10841818
Filing Dt:
05/06/2004
Publication #:
US20040238489
Pub Dt:
12/02/2004
Title:
ENVELOPE FOLLOWER END POINT DETECTION IN TIME DIVISION MULTIPLEXED PROCESSES
16
Patent #:
7381650
Issue Dt:
06/03/2008
Application #:
11155904
Filing Dt:
06/20/2005
Publication #:
US20050263485
Pub Dt:
12/01/2005
Title:
METHOD AND APPARATUS FOR PROCESS CONTROL IN TIME DIVISION MULTIPLEXED (TDM) ETCH PROCESSES
17
Patent #:
7959819
Issue Dt:
06/14/2011
Application #:
11159415
Filing Dt:
06/23/2005
Publication #:
US20050287815
Pub Dt:
12/29/2005
Title:
METHOD AND APPARATUS FOR REDUCING ASPECT RATIO DEPENDENT ETCHING IN TIME DIVISION MULTIPLEXED ETCH PROCESSES
18
Patent #:
7713432
Issue Dt:
05/11/2010
Application #:
11229319
Filing Dt:
09/16/2005
Publication #:
US20060070703
Pub Dt:
04/06/2006
Title:
METHOD & APPARATUS TO IMPROVE PLASMA ETCH UNIFORMITY
19
Patent #:
7625824
Issue Dt:
12/01/2009
Application #:
11441811
Filing Dt:
05/26/2006
Publication #:
US20060287753
Pub Dt:
12/21/2006
Title:
PROCESS CHANGE DETECTION THROUGH THE USE OF EVOLUTIONARY ALGORITHMS
20
Patent #:
7833381
Issue Dt:
11/16/2010
Application #:
11502585
Filing Dt:
08/10/2006
Publication #:
US20070039548
Pub Dt:
02/22/2007
Title:
OPTICAL EMISSION INTERFEROMETRY FOR PECVD USING A GAS INJECTION HOLE
21
Patent #:
7749400
Issue Dt:
07/06/2010
Application #:
11634377
Filing Dt:
12/04/2006
Publication #:
US20070138136
Pub Dt:
06/21/2007
Title:
METHOD FOR ETCHING PHOTOLITHOGRAPHIC SUBSTRATES
22
Patent #:
NONE
Issue Dt:
Application #:
11681805
Filing Dt:
03/05/2007
Publication #:
US20070217119
Pub Dt:
09/20/2007
Title:
Apparatus and Method for Carrying Substrates
23
Patent #:
7867403
Issue Dt:
01/11/2011
Application #:
11756074
Filing Dt:
05/31/2007
Publication #:
US20080149597
Pub Dt:
06/26/2008
Title:
TEMPERATURE CONTROL METHOD FOR PHOTOLITHOGRAPHIC SUBSTRATE
24
Patent #:
7829465
Issue Dt:
11/09/2010
Application #:
11834127
Filing Dt:
08/06/2007
Publication #:
US20080061029
Pub Dt:
03/13/2008
Title:
METHOD FOR PLASMA ETCHING OF POSITIVELY SLOPED STRUCTURES
25
Patent #:
8187483
Issue Dt:
05/29/2012
Application #:
11834299
Filing Dt:
08/06/2007
Publication #:
US20080035606
Pub Dt:
02/14/2008
Title:
METHOD TO MINIMIZE CD ETCH BIAS
26
Patent #:
8139340
Issue Dt:
03/20/2012
Application #:
12689784
Filing Dt:
01/19/2010
Publication #:
US20110026187
Pub Dt:
02/03/2011
Title:
CONDUCTIVE SEAL RING ELECTROSTATIC CHUCK
27
Patent #:
8802545
Issue Dt:
08/12/2014
Application #:
13412119
Filing Dt:
03/05/2012
Publication #:
US20130065378
Pub Dt:
03/14/2013
Title:
METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
28
Patent #:
NONE
Issue Dt:
Application #:
13445211
Filing Dt:
04/12/2012
Publication #:
US20130273237
Pub Dt:
10/17/2013
Title:
Method to Determine the Thickness of a Thin Film During Plasma Deposition
29
Patent #:
8778806
Issue Dt:
07/15/2014
Application #:
13448769
Filing Dt:
04/17/2012
Publication #:
US20120238073
Pub Dt:
09/20/2012
Title:
METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
30
Patent #:
8796154
Issue Dt:
08/05/2014
Application #:
13764110
Filing Dt:
02/11/2013
Publication #:
US20130230972
Pub Dt:
09/05/2013
Title:
METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
31
Patent #:
8785332
Issue Dt:
07/22/2014
Application #:
13764142
Filing Dt:
02/11/2013
Publication #:
US20130230968
Pub Dt:
09/05/2013
Title:
METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
32
Patent #:
8980764
Issue Dt:
03/17/2015
Application #:
13764160
Filing Dt:
02/11/2013
Publication #:
US20130230969
Pub Dt:
09/05/2013
Title:
METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
33
Patent #:
9202720
Issue Dt:
12/01/2015
Application #:
13764177
Filing Dt:
02/11/2013
Publication #:
US20130230970
Pub Dt:
09/05/2013
Title:
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
34
Patent #:
8946058
Issue Dt:
02/03/2015
Application #:
13767459
Filing Dt:
02/14/2013
Publication #:
US20130230973
Pub Dt:
09/05/2013
Title:
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
Assignor
1
PLASMA-THERM, LLC
Exec Dt:
03/29/2013
Assignee
1
TD BANK, N.A.
2307 WEST KENNEDY BOULEVARD
TAMPA, FLORIDA 33609
Correspondence name and address
JEFFREY FABIAN/SHUMAKER, LOOP & KENDRICK
101 EAST KENNEDY BOULEVARD, SUITE 2800
TAMPA, FL 33602

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