Patent Assignment Details
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Reel/Frame: | 030163/0311 | |
| Pages: | 4 |
| | Recorded: | 02/22/2013 | | |
Attorney Dkt #: | 60691.28001.00 |
Conveyance: | CORRECTION BY DECLARATION OF U.S. APPLICATION NO. 10/852,661 RECORDED AT REEL/FRAME 018420/0325 |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/10/2008
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Application #:
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10852661
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Filing Dt:
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05/25/2004
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Publication #:
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Pub Dt:
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01/06/2005
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Title:
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MASK SET HAVING SEPARATE MASKS TO FORM DIFFERENT REGIONS OF INTEGRATED CIRCUIT CHIPS, EXPOSURE SYSTEM INCLUDING THE MASK SET WITH AN APERTURE DEVICE, AND METHOD OF USING THE MASK SET TO EXPOSE A SEMICONDUCTOR WAFER
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Assignee
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GUSTAV-HEINEMANN-RING 212 |
MUNICH, GERMANY 81739 |
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Correspondence name and address
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BRADLEY J. MEIER
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C/O MORRISON & FOERSTER LLP
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1650 TYSONS BLVD STE 400
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MCLEAN, VIRGINIA 22102
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