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Patent Assignment Details
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Reel/Frame:030205/0957   Pages: 4
Recorded: 04/12/2013
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 8
1
Patent #:
Issue Dt:
03/12/1996
Application #:
08202187
Filing Dt:
02/25/1994
Title:
PLASMA ASHER WITH MICROWAVE TRAP
2
Patent #:
Issue Dt:
12/30/2003
Application #:
08321672
Filing Dt:
10/12/1994
Title:
METHOD OF TREATING AN ANTI-REFLECTIVE COATING ON A SUBSTRATE
3
Patent #:
Issue Dt:
08/11/1998
Application #:
08531602
Filing Dt:
09/21/1995
Title:
CONTACT TEMPERATURE PROBE WITH UNRESTRAINED ORIENTATION
4
Patent #:
Issue Dt:
10/05/1999
Application #:
08626451
Filing Dt:
04/02/1996
Title:
MICROWAVE PLASMA DISCHARGE DEVICE
5
Patent #:
Issue Dt:
11/09/1999
Application #:
08790554
Filing Dt:
01/30/1997
Title:
DOUBLE WINDOW EXHAUST ARRANGEMENT FOR WAFER PLASMA PROCESSOR
6
Patent #:
Issue Dt:
05/02/2000
Application #:
09001635
Filing Dt:
12/31/1997
Title:
PLASMA DISCHARGE DEVICE AND METHOD WITH DYNAMIC TUNING
7
Patent #:
Issue Dt:
08/29/2000
Application #:
09213925
Filing Dt:
12/17/1998
Title:
TEMPERATURE PROBE AND MEASUREMENT METHOD FOR LOW PRESSURE PROCESS
8
Patent #:
Issue Dt:
03/21/2000
Application #:
09218912
Filing Dt:
12/22/1998
Title:
WAFER TEMPERATURE MONITORING DEVICE UTILIZING FLEXIBLE THERMOCOUPLE
Assignor
1
Exec Dt:
03/19/2013
Assignee
1
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondence name and address
HARNESS, DICKEY & PIERCE, P.L.C.
P.O. BOX 828
BLOOMFIELD HILLS, MI 48303

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