Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 030391/0531 | |
| Pages: | 7 |
| | Recorded: | 05/10/2013 | | |
| Attorney Dkt #: | RTN2-277PUS |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13871190
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Filing Dt:
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04/26/2013
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Publication #:
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Pub Dt:
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10/30/2014
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Title:
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PHOTOLITHOGRAPHIC, THICKNESS NON-UNIFORMITY, COMPENSATION FEATURES FOR OPTICAL PHOTOLITHOGRAPHIC SEMICONDUCTOR STRUCTURE FORMATION
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Assignee
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| 870 WINTER STREET |
| WALTHAM, MASSACHUSETTS 02451-1449 |
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Correspondence name and address
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DALY, CROWLEY, MOFFORD & DURKEE, LLP
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354A TURNPIKE STREET
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SUITE 301A
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CANTON, MA 02021-2714
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