Patent Assignment Details
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Reel/Frame: | 030472/0368 | |
| Pages: | 5 |
| | Recorded: | 05/23/2013 | | |
Attorney Dkt #: | 16454-000003/US/NP |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/31/2016
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Application #:
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13989092
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Filing Dt:
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05/23/2013
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Publication #:
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Pub Dt:
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09/26/2013
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Title:
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PLASMA ETCHING APPARATUS COMPONENT AND MANUFACTURING METHOD FOR THE SAME
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Assignees
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1-1, SHIBAURA 1-CHOME |
MINATU-KU |
TOKYO, JAPAN 105-8001 |
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8, SHINSUGITA-CHO, ISOGO-KU |
YOKOHAMA-SHI, KANAGAWA KEN, JAPAN 235-0032 |
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Correspondence name and address
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HARNESS, DICKEY & PIERCE, PLC
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P. O. BOX 828
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MICHAEL E. HILTON
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BLOOMFIELD HILLS, MI 48303
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