Patent Assignment Details
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| Reel/Frame: | 030577/0574 | |
| Pages: | 5 |
| | Recorded: | 06/10/2013 | | |
| Attorney Dkt #: | 130681 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/29/2016
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Application #:
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13913643
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Filing Dt:
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06/10/2013
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Publication #:
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Pub Dt:
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10/17/2013
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Title:
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HIGH DENSITY MICROWAVE PLASMA GENERATION APPARATUS, AND MAGNETRON SPUTTERING DEPOSITION SYSTEM USING THE SAME
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Assignees
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| 1, HIGASHI 3-CHOME |
| KOMAKI-SHI, AICHI-KEN, JAPAN 485-8550 |
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| 1, FURO-CHO, CHIKUSA-KU |
| NAGOYA-SHI, AICHI-KEN, JAPAN 464-8601 |
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Correspondence name and address
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WESTERMAN, HATTORI, DANIELS & ADRIAN, LL
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1250 CONNECTICUT AVENUE, NW
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SUITE 700
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WASHINGTON, DC 20036
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