Patent Assignment Details
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| Reel/Frame: | 030594/0759 | |
| Pages: | 3 |
| | Recorded: | 06/12/2013 | | |
| Attorney Dkt #: | 56436.05500 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/01/2015
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Application #:
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13915732
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Filing Dt:
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06/12/2013
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Publication #:
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Pub Dt:
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12/18/2014
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Title:
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Method For Controlling In-Plane Uniformity Of Substrate Processed By Plasma-Assisted Process
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Assignee
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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Correspondence name and address
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SNELL & WILMER L.L.P. / DAMON L. BOYD
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ONE ARIZONA CENTER
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400 EAST VAN BUREN STREET
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PHOENIX, AZ 85004-2202
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