Patent Assignment Details
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| Reel/Frame: | 030636/0607 | |
| Pages: | 4 |
| | Recorded: | 06/18/2013 | | |
| Attorney Dkt #: | 11986.0013-00000 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/26/2014
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Application #:
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13160209
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Filing Dt:
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06/14/2011
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Publication #:
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Pub Dt:
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12/22/2011
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Title:
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MANUFACTURING APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE AND CLEANING METHOD OF MANUFACTURING APPARATUS FOR SEMICONDUCTOR
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Assignees
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| 2068-3, OOKA |
| NUMAZU-SHI, SHIZUOKA-KEN, JAPAN 410-8510 |
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| 1-1, SHOWA-CHO |
| KARIYA-CITY, AICHI-PREF, JAPAN 448-8661 |
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| 1, TOYOTA-CHO |
| TOYOTA-SHI, AICHI-KEN, JAPAN 471-8571 |
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Correspondence name and address
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RICHARD V. BURGUJIAN
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901 NEW YORK AVE, NW
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WASHINGTON, DC 20001
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