Patent Assignment Details
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| Reel/Frame: | 030647/0688 | |
| Pages: | 2 |
| | Recorded: | 06/14/2013 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/15/2015
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Application #:
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13883093
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Filing Dt:
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06/14/2013
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Publication #:
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Pub Dt:
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10/17/2013
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING METHOD, COMPUTER-READABLE MEDIUM WITH PROGRAM FOR EXECUTING A SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS
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Assignee
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| 14-1, SOTOKANDA 4-CHOME |
| CHIYODA-KU, TOKYO 1018980, JAPAN |
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Correspondence name and address
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JAMES A. OLIFF
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OLIFF & BERRIDGE, PLC
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P.O. BOX 320850
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ALEXANDRIA, VA 22320-4850
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