Patent Assignment Details
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| Reel/Frame: | 030886/0856 | |
| Pages: | 3 |
| | Recorded: | 07/26/2013 | | |
| Attorney Dkt #: | TSMC2012-1211 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/19/2016
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Application #:
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13839328
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Filing Dt:
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03/15/2013
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Publication #:
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Pub Dt:
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09/18/2014
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Title:
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METHOD AND APPARATUS FOR CONTROLLING BEAM ANGLE DURING ION IMPLANTATION OF A SEMICONDUCTOR WAFER BASED UPON PRESSURE
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Assignee
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| NO. 8, LI-HSIN ROAD 6 |
| HSIN-CHU SCIENCE PARK |
| HSIN-CHU, TAIWAN 300-77 |
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Correspondence name and address
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COOPER LEGAL GROUP LLC
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6505 ROCKSIDE ROAD SUITE 330
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INDEPENDENCE, OH 44131
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