Patent Assignment Details
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| Reel/Frame: | 030890/0393 | |
| Pages: | 10 |
| | Recorded: | 07/28/2013 | | |
| Attorney Dkt #: | TTCA-252DIV |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/27/2016
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Application #:
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13854910
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Filing Dt:
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04/01/2013
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Publication #:
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Pub Dt:
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09/05/2013
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Title:
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HOLLOW CATHODE DEVICE AND METHOD FOR USING THE DEVICE TO CONTROL THE UNIFORMITY OF A PLASMA PROCESS
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Assignee
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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2545 W. FRYE RD.
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SUITE 1
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CHANDLER, AZ 85224
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