Patent Assignment Details
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| Reel/Frame: | 030904/0025 | |
| Pages: | 4 |
| | Recorded: | 07/30/2013 | | |
| Attorney Dkt #: | BPL0162USD |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/12/2015
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Application #:
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13954021
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Filing Dt:
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07/30/2013
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Publication #:
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Pub Dt:
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11/21/2013
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Title:
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METHOD OF MEASURING TEMPERATURE OF COMPONENT IN PROCESSING CHAMBER OF SUBSTRATE PROCESSING APPARATUS
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Assignee
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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CANTOR COLBURN LLP
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20 CHURCH STREET
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22ND FLOOR
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HARTFORD, CT 06103
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