Patent Assignment Details
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| Reel/Frame: | 031180/0861 | |
| Pages: | 12 |
| | Recorded: | 09/11/2013 | | |
| Attorney Dkt #: | HITACHI12-21210020US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/27/2017
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Application #:
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14022860
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Filing Dt:
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09/10/2013
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Publication #:
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Pub Dt:
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03/13/2014
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND METHOD OF GENERATING RECIPE
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Assignee
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| 14-1, SOTOKANDA 4-CHOME, |
| CHIYODA-KU |
| TOKYO, JAPAN 1018980 |
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Correspondence name and address
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VOLPE AND KOENIG, P.C.
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30 SOUTH 17TH STREET
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UNITED PLAZA
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PHILADELPHIA, PA 19103
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