Patent Assignment Details
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Reel/Frame: | 031197/0197 | |
| Pages: | 7 |
| | Recorded: | 09/12/2013 | | |
Attorney Dkt #: | 63857.8295.US00 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/26/2016
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Application #:
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14025678
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Filing Dt:
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09/12/2013
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Publication #:
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Pub Dt:
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03/12/2015
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Title:
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ANNEAL MODULE FOR SEMICONDUCTOR WAFERS
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Assignee
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PERKINS COIE LLP/SEMITOOL
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PO BOX 1208
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SEATTLE, WA 98111-1208
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