Patent Assignment Details
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| Reel/Frame: | 031426/0613 | |
| Pages: | 3 |
| | Recorded: | 10/17/2013 | | |
| Attorney Dkt #: | HITACHI12-20910047US02 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/03/2015
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Application #:
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14056374
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Filing Dt:
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10/17/2013
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Publication #:
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Pub Dt:
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02/13/2014
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Title:
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METHOD OF CONTROLLING SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD OF SUBSTRATE PROCESSING APPARATUS AND TRANSFER METHOD PERFORMED IN SUBSTRATE PROCESSING APPARATUS
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Assignee
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| 14-1, SOTOKANDA 4-CHOME, |
| CHIYODA-KU, TOKYO, JAPAN 1018980 |
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Correspondence name and address
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VOLPE AND KOENIG, P.C.
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UNITED PLAZA
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30 SOUTH 17TH STREET
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PHILADELPHIA, PA 19103
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