Patent Assignment Details
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Reel/Frame: | 031504/0864 | |
| Pages: | 4 |
| | Recorded: | 10/29/2013 | | |
Attorney Dkt #: | 032584-012000 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/30/2016
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Application #:
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14066631
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Filing Dt:
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10/29/2013
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Publication #:
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Pub Dt:
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05/01/2014
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Title:
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ICP SOURCE DESIGN FOR PLASMA UNIFORMITY AND EFFICIENCY ENHANCEMENT
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Assignee
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188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) PUDONG |
SHANGHAI, CHINA 201201 |
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Correspondence name and address
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NIXON PEABODY LLP
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P.O. BOX 60610
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PALO ALTO, CA 94306
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