Total properties:
33
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Patent #:
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Issue Dt:
|
05/31/1994
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Application #:
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07769894
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Filing Dt:
|
10/01/1991
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Title:
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SYSTEM FOR PRECISION CLEANING BY JET SPRAY
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Patent #:
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|
Issue Dt:
|
04/25/1995
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Application #:
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07952126
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Filing Dt:
|
09/28/1992
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Title:
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ELECTROSTATIC DISCHARGE CONTROL DURING JET SPRAY
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Patent #:
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Issue Dt:
|
05/31/1994
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Application #:
|
08033906
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Filing Dt:
|
03/19/1993
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Title:
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ENVIRONMENT CONTROL APPARATUS
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Patent #:
|
|
Issue Dt:
|
10/11/1994
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Application #:
|
08056684
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Filing Dt:
|
04/30/1993
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Title:
|
METHOD FOR CLEANING SURFACE BY HEATING AND A STREAM OF SNOW
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Patent #:
|
|
Issue Dt:
|
03/18/1997
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Application #:
|
08395124
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Filing Dt:
|
02/27/1995
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Title:
|
MODULAR CO2 JET SPRAY DEVICE
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Patent #:
|
|
Issue Dt:
|
10/01/1996
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Application #:
|
08403039
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Filing Dt:
|
03/13/1995
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Title:
|
OPTICAL SENSING APPARATUS FOR CO2 JET SPRAY DEVICES
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Patent #:
|
|
Issue Dt:
|
11/17/1998
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Application #:
|
08727809
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Filing Dt:
|
10/07/1996
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Title:
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APPARATUS AND METHOD FOR CLEANING LARGE GLASS PLATES USING LINEAR ARRAYS OF CARBON DIOXIDE (CO2) JET SPRAY NOZZLES
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|
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Patent #:
|
|
Issue Dt:
|
09/15/1998
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Application #:
|
08799679
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Filing Dt:
|
02/11/1997
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Title:
|
CARBON DIOXIDE JET SPRAY DISK CLEANING SYSTEM
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|
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Patent #:
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|
Issue Dt:
|
11/23/1999
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Application #:
|
08805510
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Filing Dt:
|
02/26/1997
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Title:
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APPARATUS FOR CLEANING AND TESTING PRECISION COMPONENTS OF HARD DRIVES AND THE LIKE
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|
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Patent #:
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|
Issue Dt:
|
06/16/1998
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Application #:
|
08813267
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Filing Dt:
|
02/14/1997
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Title:
|
INTEGRATED CIRCUIT CHIP MODULE CLEANING USING A CARBON DIOXIDE JET SPRAY
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|
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Patent #:
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|
Issue Dt:
|
12/29/1998
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Application #:
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08814792
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Filing Dt:
|
10/04/1996
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Title:
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PHOTORESIST AND REDEPOSITION REMOVAL USING CARBON DIOXIDE JET SPRAY
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|
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Patent #:
|
|
Issue Dt:
|
11/14/2000
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Application #:
|
08816954
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Filing Dt:
|
10/04/1996
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Title:
|
USE OF ELECTROSTATIC BIAS TO CLEAN NON-ELECTROSTATICALLY SENSITIVE COMPONENTS WITH A CARBON DIOXIDE SPRAY
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|
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Patent #:
|
|
Issue Dt:
|
08/08/2000
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Application #:
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08818522
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Filing Dt:
|
03/14/1997
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Title:
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CARBON DIOXIDE JET SPRAY PALLET CLEANING SYSTEM
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|
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Patent #:
|
|
Issue Dt:
|
11/17/1998
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Application #:
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08821960
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Filing Dt:
|
10/04/1996
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Title:
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ELECTROSTATIC DISCHARGE PROTECTION OF STATIC SENSITIVE DEVICES CLEANED WITH CARBON DIOXIDE SPRAY
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|
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Patent #:
|
|
Issue Dt:
|
09/08/1998
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Application #:
|
08850873
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Filing Dt:
|
05/02/1997
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Title:
|
CARBON DIOXIDE LIQUID AND GAS SENSOR APPARATUS FOR USE WITH JET SPRAY CLEANING SYSTEMS
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|
|
Patent #:
|
|
Issue Dt:
|
05/23/2000
|
Application #:
|
08850874
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Filing Dt:
|
05/02/1997
|
Title:
|
WAFER CLEANING USING A LASER AND CARBON DIOXIDE SNOW
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|
|
Patent #:
|
|
Issue Dt:
|
01/16/2001
|
Application #:
|
09157094
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Filing Dt:
|
09/18/1998
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Title:
|
CO2 JET SPRAY NOZZLES WITH MULTIPLE ORIFICES
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|
|
Patent #:
|
|
Issue Dt:
|
09/25/2001
|
Application #:
|
09332206
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Filing Dt:
|
06/12/1999
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Title:
|
METHOD OF IMPROVING X-RAY LITHOGRAPHY IN THE SUB 100NM RANGE TO CREATE HIGH QUALITY SEMICONDUCTOR DEVICES
|
|
|
Patent #:
|
|
Issue Dt:
|
08/21/2001
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Application #:
|
09411396
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Filing Dt:
|
10/04/1999
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Title:
|
APPARATUS AND METHOD FOR ANALYSIS OF IMPURITIES IN LIQUID CARBON DIOXIDE
|
|
|
Patent #:
|
|
Issue Dt:
|
12/31/2002
|
Application #:
|
09660354
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Filing Dt:
|
09/12/2000
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Title:
|
METHOD FOR SELECTIVE METAL FILM LAYER REMOVAL USING CARBON DIOXIDE JET SPRAY
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2005
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Application #:
|
09876443
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Filing Dt:
|
06/07/2001
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Publication #:
|
|
Pub Dt:
|
10/04/2001
| | | | |
Title:
|
METHOD OF IMPROVING X-RAY LITHOGRAPHY IN THE SUB 100NM RANGE TO CREATE HIGH QUALITY SEMICONDUCTOR DEVICES
|
|
|
Patent #:
|
|
Issue Dt:
|
06/18/2002
|
Application #:
|
09886098
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Filing Dt:
|
06/22/2001
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Publication #:
|
|
Pub Dt:
|
10/25/2001
| | | | |
Title:
|
APPARATUS FOR ANALYSIS OF IMPURITIES IN LIQUID CARBON DIOXIDE
|
|
|
Patent #:
|
|
Issue Dt:
|
02/08/2005
|
Application #:
|
10324221
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Filing Dt:
|
12/19/2002
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Publication #:
|
|
Pub Dt:
|
10/09/2003
| | | | |
Title:
|
LIQUID-ASSISTED CRYOGENIC CLEANING
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|
|
Patent #:
|
|
Issue Dt:
|
09/27/2005
|
Application #:
|
10403147
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Filing Dt:
|
03/31/2003
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Publication #:
|
|
Pub Dt:
|
10/09/2003
| | | | |
Title:
|
VAPOR-ASSISTED CRYOGENIC CLEANING
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|
|
Patent #:
|
|
Issue Dt:
|
06/06/2006
|
Application #:
|
10886251
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Filing Dt:
|
07/07/2004
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Publication #:
|
|
Pub Dt:
|
12/23/2004
| | | | |
Title:
|
LIQUID-ASSISTED CRYOGENIC CLEANING
|
|
|
Patent #:
|
|
Issue Dt:
|
07/21/2009
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Application #:
|
11336390
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Filing Dt:
|
01/20/2006
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Publication #:
|
|
Pub Dt:
|
10/11/2007
| | | | |
Title:
|
SYSTEMS AND METHODS FOR A SCANNING BOOM MICROSCOPE
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11793647
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Filing Dt:
|
01/12/2009
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Publication #:
|
|
Pub Dt:
|
05/21/2009
| | | | |
Title:
|
SYSTEM FOR CLEANING A SURFACE USING CRYOGENIC AEROSOL AND FLUID REACTANT
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12261157
|
Filing Dt:
|
10/30/2008
|
Publication #:
|
|
Pub Dt:
|
04/30/2009
| | | | |
Title:
|
CO2 SYSTEM FOR POLYMER FILM CLEANING
|
|
|
Patent #:
|
|
Issue Dt:
|
06/04/2013
|
Application #:
|
12556643
|
Filing Dt:
|
09/10/2009
|
Publication #:
|
|
Pub Dt:
|
03/10/2011
| | | | |
Title:
|
CO2 NOZZLES
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13284078
|
Filing Dt:
|
10/28/2011
|
Publication #:
|
|
Pub Dt:
|
11/08/2012
| | | | |
Title:
|
Integrated Substrate Cleaning System and Method
|
|
|
Patent #:
|
|
Issue Dt:
|
08/12/2014
|
Application #:
|
13886594
|
Filing Dt:
|
05/03/2013
|
Publication #:
|
|
Pub Dt:
|
09/19/2013
| | | | |
Title:
|
CO2 Nozzles
|
|
|
Patent #:
|
|
Issue Dt:
|
04/02/2019
|
Application #:
|
13897552
|
Filing Dt:
|
05/20/2013
|
Publication #:
|
|
Pub Dt:
|
11/21/2013
| | | | |
Title:
|
CONTAMINATION REMOVAL APPARATUS AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
12/11/2001
|
Application #:
|
29105130
|
Filing Dt:
|
05/18/1999
|
Title:
|
VERTICAL STEPPER STAGE APPARATUS
|
|