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Reel/Frame:031678/0137   Pages: 3
Recorded: 11/26/2013
Attorney Dkt #:5571-0003
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/17/2017
Application #:
14009289
Filing Dt:
11/26/2013
Publication #:
Pub Dt:
03/13/2014
Title:
DUAL WAFER STAGE SWITCHING SYSTEM FOR A LITHOGRAPHY MACHINE
Assignors
1
Exec Dt:
11/07/2013
2
Exec Dt:
11/07/2013
3
Exec Dt:
11/07/2013
4
Exec Dt:
11/07/2013
5
Exec Dt:
11/07/2013
Assignee
1
POST BOX100084 BRANCH 82
TSINGHUA UNIVERSITY PATENT OFFICE, HAIDIAN DISTRICT
BEIJING, CHINA 100084
Correspondence name and address
YOON S. HAM
2318 MILL ROAD
SUITE 1400
ALEXANDRIA, VA 22314

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