Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 031819/0421 | |
| Pages: | 4 |
| | Recorded: | 12/19/2013 | | |
| Attorney Dkt #: | 04299.0999-00000 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
11
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Patent #:
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Issue Dt:
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12/01/1998
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Application #:
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08701614
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Filing Dt:
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08/22/1996
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Title:
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METHOD OF EVALUATING SHAPED BEAM OF CHARGED BEAM WRITER AND METHOD OF FORMING PATTERN
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08711263
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Filing Dt:
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09/09/1996
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Title:
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METHOD FOR CORRECTING ASTIGMATISM AND FOCUSING IN CHARGED PARTICLE OPTICAL LENS-BARREL
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Patent #:
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Issue Dt:
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05/29/2001
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Application #:
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09040286
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Filing Dt:
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03/18/1998
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Title:
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APPARATUS FOR EMITTING A BEAM TO A SAMPLE USED FOR MANUFACTURING A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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06/27/2000
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Application #:
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09040391
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Filing Dt:
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03/18/1998
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Title:
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POSITION MEASURING APPARATUS
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09275186
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Filing Dt:
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03/23/1999
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Title:
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ELECTRON BEAM EXPOSURE APPARATUS
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Patent #:
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Issue Dt:
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05/20/2003
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Application #:
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09343508
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Filing Dt:
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06/30/1999
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Title:
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CHARGED BEAM EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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05/02/2006
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Application #:
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10329514
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Filing Dt:
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12/27/2002
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Publication #:
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Pub Dt:
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02/16/2006
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Title:
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APPARATUS AND METHOD FOR FORMING PATTERN
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Patent #:
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Issue Dt:
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10/07/2008
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Application #:
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11337501
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Filing Dt:
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01/24/2006
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Publication #:
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Pub Dt:
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08/31/2006
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Title:
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CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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07/21/2009
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Application #:
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11434258
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Filing Dt:
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05/16/2006
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Publication #:
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Pub Dt:
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12/14/2006
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Title:
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PATTERN DRAWING SYSTEM, ELECTRICALLY CHARGED BEAM DRAWING METHOD, PHOTOMASK MANUFACTURING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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02/24/2009
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Application #:
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11850364
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Filing Dt:
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09/05/2007
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Publication #:
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Pub Dt:
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08/28/2008
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Title:
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POSITION DETECTING APPARATUS AND POSITION DETECTING METHOD
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Patent #:
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Issue Dt:
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01/29/2013
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Application #:
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13240242
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Filing Dt:
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09/22/2011
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Publication #:
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Pub Dt:
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09/20/2012
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Title:
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ELECTRON BEAM IRRADIATION APPARATUS AND ELECTRON BEAM DRAWING APPARATUS
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Assignee
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| 8-1 SHINSUGITA-CHO |
| ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, JAPAN 235-8522 |
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Correspondence name and address
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RICHARD V. BURGUJIAN
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901 NEW YORK AVE, NW
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WASHINGTON, DC 20001
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