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Patent #:
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Issue Dt:
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06/06/1995
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Application #:
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08214969
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Filing Dt:
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03/18/1994
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Title:
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SEMICONDUCTOR WAFER POLISHER AND METHOD
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Patent #:
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Issue Dt:
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02/25/1997
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Application #:
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08242560
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Filing Dt:
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05/13/1994
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Title:
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SEMICONDUCTOR WAFER POLISHING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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11/05/1996
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Application #:
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08245592
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Filing Dt:
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05/18/1994
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Title:
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METHOD OF ROUGH POLISHING SEMICONDUCTOR WAFERS TO REDUCE SURFACE ROUGHNESS
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Patent #:
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Issue Dt:
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11/12/1996
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Application #:
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08283782
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Filing Dt:
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08/01/1994
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Title:
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METHOD FOR ETCHING A SEMICONDUCTOR MATERIAL WITHOUT ALTERING FLOW PATTERN DEFECT DISTRIBUTION
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Patent #:
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Issue Dt:
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01/14/1997
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Application #:
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08403301
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Filing Dt:
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03/14/1995
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Title:
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PRECISION CONTROLLED PRECIPITATION OF OXYGEN IN SILICON
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Patent #:
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Issue Dt:
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12/03/1996
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Application #:
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08421629
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Filing Dt:
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04/13/1995
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Title:
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FACILITY ENVIRONMENTAL CONTROL SYSTEM
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Patent #:
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Issue Dt:
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05/21/1996
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Application #:
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08423363
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Filing Dt:
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04/18/1995
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Title:
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SUSCEPTOR AND BAFFLE THEREFOR
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Patent #:
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Issue Dt:
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08/05/1997
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Application #:
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08459765
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Filing Dt:
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06/02/1995
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Title:
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METHOD FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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11/26/1996
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Application #:
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08483304
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Filing Dt:
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06/07/1995
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Title:
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A SILICON SINGLE CRYSTAL HAVING ELIMINATED DISCLOCATION IN ITS NECK CRYSTAL
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Patent #:
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Issue Dt:
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01/14/1997
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Application #:
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08488924
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Filing Dt:
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06/09/1995
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Title:
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APPARATUS FOR ROTATING A CRUCIBLE OF A CRYSTAL PULLING MACHINE
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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08490465
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Filing Dt:
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06/14/1995
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Title:
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SURFACE-TREATED CRUCIBLES FOR IMPROVED ZERO DISLOCATION PERFORMANCE
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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08490473
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Filing Dt:
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06/14/1995
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Title:
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METHODS FOR IMPROVING ZERO DISLOCATION YIELD OF SINGLE CRYSTALS
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Patent #:
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Issue Dt:
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12/31/1996
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Application #:
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08507055
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Filing Dt:
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07/25/1995
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Title:
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METHOD FOR PREPARING MOLTEN SILICON MELT FROM POLYCRYSTALLINE SILICON CHARGE
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Patent #:
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Issue Dt:
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06/01/1999
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Application #:
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08530612
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Filing Dt:
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09/20/1995
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Title:
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METHOD FOR TUNING BARREL REACTOR PURGE SYSTEM
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Patent #:
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Issue Dt:
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08/12/1997
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Application #:
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08558609
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Filing Dt:
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11/14/1995
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Title:
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NON-DISTORTING VIDEO CAMERA FOR USE WITH A SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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01/27/1998
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Application #:
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08568997
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Filing Dt:
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12/07/1995
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Title:
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PRE-THERMAL TREATMENT CLEANING PROCESS
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Patent #:
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Issue Dt:
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11/24/1998
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Application #:
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08589612
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Filing Dt:
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01/22/1996
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Title:
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APPARATUS FOR CONTROLLING NUCLEATION OF OXYGEN PRECIPITATES IN SILICON CRYSTALS
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08595075
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Filing Dt:
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02/01/1996
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Title:
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METHOD FOR PREPARING MOLTEN SILICON MELT FROM POLYCRYSTALLINE SILICON CHARGE
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Patent #:
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Issue Dt:
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09/09/1997
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Application #:
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08620137
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Filing Dt:
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03/21/1996
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Title:
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SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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11/24/1998
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Application #:
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08639185
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Filing Dt:
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04/26/1996
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Title:
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APPARATUS AND METHOD FOR SHAPING POLISHING PADS
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Patent #:
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Issue Dt:
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12/01/1998
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Application #:
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08644181
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Filing Dt:
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05/10/1996
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Title:
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METHOD AND APPARATUS FOR AIMING A BARREL REACTOR NOZZLE
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Patent #:
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Issue Dt:
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10/21/1997
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Application #:
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08653666
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Filing Dt:
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05/31/1996
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Title:
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AUTOMATED WAFER LAPPING SYSTEM
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Patent #:
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Issue Dt:
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05/13/1997
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Application #:
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08675550
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Filing Dt:
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07/03/1996
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Title:
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PROCESS FOR ELIMINATING DISLOCATIONS IN THE NECK OF A SILICON SINGLE CRYSTAL
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Patent #:
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Issue Dt:
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12/15/1998
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Application #:
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08686565
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Filing Dt:
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07/26/1996
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Title:
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COOLING SYSTEM AND METHOD FOR EPITAXIAL BARREL REACTOR
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08686570
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Filing Dt:
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07/26/1996
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Title:
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POLYSILICON PARTICLE CLASSIFYING APPARATUS
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Patent #:
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Issue Dt:
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08/04/1998
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Application #:
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08689432
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Filing Dt:
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08/09/1996
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Title:
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METHOD AND APPARATUS FOR CONTROLLING FLATNESS OF POLISHED SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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07/14/1998
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Application #:
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08694157
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Filing Dt:
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08/08/1996
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Title:
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PROCESS FOR CONTROLLING THERMAL HISTORY OF CZOCHRALSKI-GROWN SILICON
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Patent #:
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Issue Dt:
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10/27/1998
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Application #:
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08710655
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Filing Dt:
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09/20/1996
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Title:
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CUTTING MACHINE
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Patent #:
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Issue Dt:
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08/18/1998
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Application #:
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08711085
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Filing Dt:
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09/09/1996
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Title:
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SIO PROBE FOR REAL-TIME MONITORING AND CONTROL OF OXYGEN DURING CZOCHRALSKI GROWTH OF SINGLE CRYSTAL SILICON
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Patent #:
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Issue Dt:
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06/16/1998
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Application #:
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08725861
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Filing Dt:
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10/04/1996
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Title:
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A METHOD FOR ROTATING A CRUCIBLE OF A CRYSTAL PULLING MACHINE
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Patent #:
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Issue Dt:
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05/18/1999
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Application #:
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08732527
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Filing Dt:
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10/15/1996
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Title:
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PROCESS FOR CONTROLLING THE OXYGEN CONTENT IN SILICON WAFERS HEAVILY DOPED WITH ANTIMONY OR ARSENIC
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Patent #:
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Issue Dt:
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01/05/1999
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Application #:
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08739550
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Filing Dt:
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10/30/1996
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Title:
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GETTERING AGENT
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08759017
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Filing Dt:
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12/02/1996
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Title:
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FACILITY ENVIRONMENTAL CONTROL SYSTEM
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Patent #:
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Issue Dt:
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06/23/1998
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Application #:
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08764458
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Filing Dt:
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11/12/1996
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Title:
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POLISHING BLOCK HEATER
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Patent #:
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Issue Dt:
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11/30/1999
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Application #:
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08806436
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Filing Dt:
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02/26/1997
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Title:
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IDEAL OXYGEN PRECIPITATING SILICON WAFERS AND OXYGEN OUT-DIFFUSION-LESS PROCESS THEREFOR
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Patent #:
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Issue Dt:
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10/06/1998
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Application #:
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08843632
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Filing Dt:
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04/10/1997
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Title:
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APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08863960
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Filing Dt:
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05/27/1997
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Title:
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SECONDARY EDGE REFLECTOR FOR HORIZONTAL REACTOR
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Patent #:
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Issue Dt:
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12/28/1999
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Application #:
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08895388
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Filing Dt:
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07/16/1997
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Title:
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METHOD AND APPARATUS FOR CUTTING AN INGOT
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Patent #:
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Issue Dt:
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12/08/1998
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Application #:
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08896177
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Filing Dt:
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07/17/1997
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Title:
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METHOD AND SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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08/24/1999
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Application #:
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08904943
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Filing Dt:
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08/01/1997
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Title:
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HEAT SHIELD ASSEMBLY AND METHOD OF GROWING VACANCY RICH SINGLE CRYSTAL SILICON
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Patent #:
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Issue Dt:
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03/23/1999
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Application #:
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08907795
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Filing Dt:
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08/08/1997
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Title:
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NON-DASH NECK METHOD FOR SINGLE CRYSTAL SILICON GROWTH
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Patent #:
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Issue Dt:
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03/16/1999
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Application #:
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08934946
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Filing Dt:
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09/22/1997
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Title:
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PROCESS FOR THE PREPARATION OF SILICON WAFERS HAVING A CONTROLLED DISTRIBUTION OF OXYGEN PRECIPITATE NUCLEATION CENTERS
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Patent #:
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Issue Dt:
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03/16/1999
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Application #:
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08939802
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Filing Dt:
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09/30/1997
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Title:
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METHOD AND SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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07/13/1999
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Application #:
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08940166
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Filing Dt:
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09/30/1997
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Title:
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HEAT SHIELD FOR CRYSTAL PULLER
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Patent #:
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Issue Dt:
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02/02/1999
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Application #:
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08941777
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Filing Dt:
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09/30/1997
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Title:
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WAFER DEMOUNT APPARATUS
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Patent #:
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Issue Dt:
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05/25/1999
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Application #:
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08950842
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Filing Dt:
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10/15/1997
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Title:
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RADIANT POLISHING BLOCK HEATER
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Patent #:
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Issue Dt:
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07/06/1999
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Application #:
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08951264
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Filing Dt:
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10/16/1997
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Title:
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PROCESS FOR PREPARING A SILICON MELT FROM A POLYSILICON CHARGE
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Patent #:
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Issue Dt:
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06/08/1999
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Application #:
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08966798
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Filing Dt:
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11/10/1997
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Title:
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CLOSED LOOP PROCESS FOR PRODUCING POLYCRYSTALLINE SILICON AND FUMED SILICA
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Patent #:
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Issue Dt:
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11/24/1998
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Application #:
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08970129
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Filing Dt:
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11/13/1997
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Title:
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APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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11/17/1998
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Application #:
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08990123
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Filing Dt:
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12/12/1997
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Title:
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POST-LAPPING CLEANING PROCESS FOR SILICON WAFERS
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Patent #:
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Issue Dt:
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12/28/1999
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Application #:
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09000061
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Filing Dt:
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04/21/1998
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Title:
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METHOD AND APPARATUS FOR WASHING SILICON INGOT WITH WATER TO REMOVE PARTICULATE MATTER
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Patent #:
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Issue Dt:
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02/01/2000
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Application #:
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09002592
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Filing Dt:
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01/05/1998
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Title:
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CRYSTAL GROWING APPARATUS WITH MELT-DOPING FACILITY
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Patent #:
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Issue Dt:
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11/23/1999
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Application #:
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09003986
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Filing Dt:
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01/07/1998
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Title:
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SITU WAFER CLEANING PROCESS
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Patent #:
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Issue Dt:
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06/22/1999
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Application #:
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09017942
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Filing Dt:
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02/03/1998
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Title:
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CRUCIBLE AND METHOD OF PREPARATION THEREOF
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09030110
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Filing Dt:
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02/25/1998
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Title:
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IDEAL OXYGEN PRECIPITATING SILICON WAFERS AND OXYGEN OUT-DIFFUSION- LESS PROCESS THEREFOR
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09057800
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Filing Dt:
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04/09/1998
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Title:
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LOW DEFECT DENSITY, IDEAL OXYGEN PRECIPITATING SILICON
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09057801
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Filing Dt:
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04/09/1998
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Title:
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LOW DEFECT DENSITY SELF-INTERSTITIAL DOMINATED SILICON
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Patent #:
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Issue Dt:
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07/06/1999
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Application #:
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09057851
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Filing Dt:
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04/09/1998
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Title:
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LOW DEFECT DENSITY VACANCY DOMINATED SILICON
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09057907
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Filing Dt:
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04/09/1998
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Title:
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LOW DEFECT DENSITY SILICON
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Patent #:
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Issue Dt:
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04/06/1999
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Application #:
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09072564
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Filing Dt:
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05/05/1998
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Title:
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INJECTOR FOR REACTOR
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Patent #:
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Issue Dt:
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11/19/2002
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Application #:
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09082906
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Filing Dt:
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05/21/1998
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Title:
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PROCESS FOR THE REMOVAL OF COPPER AND OTHER METALLIC IMPURITIES FROM SILICON
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Patent #:
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Issue Dt:
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07/25/2000
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Application #:
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09092391
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Filing Dt:
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06/05/1998
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Title:
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ELECTRICAL RESISTANCE HEATER FOR CRYSTAL GROWING APPARATUS
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09093520
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Filing Dt:
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06/08/1998
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Title:
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COLLECTOR FOR AN AUTOMATED ON-LINE BATH ANALYSIS SYSTEM
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Patent #:
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Issue Dt:
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02/06/2001
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Application #:
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09097779
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Filing Dt:
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06/15/1998
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Title:
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PROCESS AND APPRATUS FOR PREPARATION OF SILICON CRYSTALS WITH REDUCED METAL CONTENT
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Patent #:
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Issue Dt:
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10/10/2000
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Application #:
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09107728
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Filing Dt:
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06/30/1998
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Title:
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SUSCEPTOR FOR BARREL REACTOR
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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09167747
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Filing Dt:
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10/07/1998
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Title:
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CONTINUOUS OXIDATION PROCESS FOR CRYSTAL PULLING APPARATUS
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Patent #:
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Issue Dt:
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01/09/2001
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Application #:
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09172546
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Filing Dt:
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10/14/1998
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Title:
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METHOD AND SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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04/25/2000
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Application #:
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09234144
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Filing Dt:
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01/19/1999
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Title:
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HEAT SHIELD FOR CRYSTAL PULLER
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09245238
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Filing Dt:
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02/05/1999
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Title:
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TUNGSTEN DOPED CRUCIBLE AND METHOD FOR PREPARING SAME
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09250908
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Filing Dt:
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02/16/1999
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Title:
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AN EPITAXIAL SILICON WAFER WITH INTRINSIC GETTERING
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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09258478
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Filing Dt:
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02/26/1999
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Title:
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HEAT SHIELD ASSEMBLY FOR CRYSTAL PULLER
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Patent #:
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Issue Dt:
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04/10/2001
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Application #:
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09268968
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Filing Dt:
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03/16/1999
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Title:
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APPARATUS FOR CONTROLLING THE OXYGEN CONTENT IN SILICON WAFERS HEAVILY DOPED WITH ANTIMONY OR ARSENIC
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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09270366
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Filing Dt:
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03/16/1999
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Title:
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VACANCY DOMINATED, DEFECT-FREE SILICON
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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09276278
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Filing Dt:
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03/25/1999
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Title:
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METHOD FOR PROCESSING A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
|
06/05/2001
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Application #:
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09287916
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Filing Dt:
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04/07/1999
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Title:
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METHOD AND SYSTEM OF CONTROLLING TAPER GROWTH IN A SEMICONDUCTOR CRYSTAL GROWTH PROCESS
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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09340489
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Filing Dt:
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06/30/1999
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Title:
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IDEAL OXYGEN PRECIPITATING SILICON WAFERS AND OXYGEN OUT-DIFFUSION-LESS PROCESS THEREFOR
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Patent #:
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Issue Dt:
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11/06/2001
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Application #:
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09344036
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Filing Dt:
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06/25/1999
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Publication #:
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Pub Dt:
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06/14/2001
| | | | |
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Title:
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PROCESS FOR PREPARING DEFECT FREE SILICON CRYSTALS WHICH ALLOWS FOR VARIABILITY IN PROCESS CONDITIONS
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Patent #:
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Issue Dt:
|
12/11/2001
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Application #:
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09344709
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Filing Dt:
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06/25/1999
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Publication #:
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Pub Dt:
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07/19/2001
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Title:
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PROCESS FOR GROWTH OF DEFECT FREE SILICON CRYSTALS OF ARBITRARILY LARGE DIAMETERS
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Patent #:
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Issue Dt:
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01/15/2002
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Application #:
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09352980
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Filing Dt:
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07/14/1999
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Title:
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PROCESS FOR FABRICATING SEMICONDUCTOR WAFERS WITH EXTERNAL GETTERING
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Patent #:
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Issue Dt:
|
09/05/2000
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Application #:
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09356616
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Filing Dt:
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07/19/1999
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Title:
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METHOD OF PROCESSING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
|
12/07/2004
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Application #:
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09366850
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Filing Dt:
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08/04/1999
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Title:
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NON-UNIFORM MINORITY CARRIER LIFETIME DISTRIBUTIONS IN HIGH PERFORMANCE SILICON POWER DEVICES
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|
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Patent #:
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Issue Dt:
|
01/08/2002
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Application #:
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09379383
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Filing Dt:
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08/23/1999
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Title:
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NON-OXYGEN PRECIPITATING CZOCHRALSKI SILICON WAFERS
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Patent #:
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Issue Dt:
|
02/20/2001
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Application #:
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09384669
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Filing Dt:
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08/27/1999
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Title:
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PROCESS FOR PREPARING AN IDEAL OXYGEN PRECIPITATING SILICON WAFER
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|
|
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Patent #:
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|
Issue Dt:
|
03/26/2002
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Application #:
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09385108
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Filing Dt:
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08/27/1999
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Title:
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THERMALLY ANNEALED WAFERS HAVING IMPROVED INTERNAL GETTERING
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Patent #:
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Issue Dt:
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05/22/2001
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Application #:
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09387288
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Filing Dt:
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08/31/1999
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Title:
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SILICON ON INSULATOR STRUCTURE FROM LOW DEFECT DENSITY SINGLE CRYSTAL SILICON
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Patent #:
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Issue Dt:
|
04/10/2001
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Application #:
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09404428
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Filing Dt:
|
09/23/1999
|
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Title:
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METHOD OF PROCESSING SEMICONDUCTOR WAFERS TO BUILD IN BACK SURFACE DAMAGE
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|
|
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Patent #:
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Issue Dt:
|
07/09/2002
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Application #:
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09416998
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Filing Dt:
|
10/13/1999
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Title:
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THERMALLY ANNEALED, LOW DEFECT DENSITY SINGLE CRYSTAL SILICON
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|
|
|
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Patent #:
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|
Issue Dt:
|
09/04/2001
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Application #:
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09417610
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Filing Dt:
|
10/13/1999
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Title:
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EPITAXIAL SILICON WAFERS SUBSTANTIALLY FREE OF GROWN - IN DEFECTS
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|
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Patent #:
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Issue Dt:
|
03/20/2001
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Application #:
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09421187
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Filing Dt:
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10/19/1999
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Title:
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METHOD OF CONTROLLING GROWTH OF A SEMICONDUCTOR CRYSTAL TO AUTOMATICALLY TRANSITION FROM TAPER GROWTH TO TARGET DIAMETER GROWTH
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|
|
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Patent #:
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Issue Dt:
|
09/25/2001
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Application #:
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09432928
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Filing Dt:
|
11/03/1999
|
|
Title:
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METHOD OF DETERMINING PERFORMANCE CHARACTERISTICS OF POLISHING PADS
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|
|
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Patent #:
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Issue Dt:
|
10/28/2003
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Application #:
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09475320
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Filing Dt:
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12/30/1999
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Publication #:
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Pub Dt:
|
01/24/2002
| | | | |
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Title:
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METHOD FOR REVEALING AGGLOMERATED INTRINSIC POINT DEFECTS IN SEMICONDUCTOR CRYSTALS
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|
|
|
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Patent #:
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|
Issue Dt:
|
04/23/2002
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Application #:
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09481080
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Filing Dt:
|
01/11/2000
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|
Publication #:
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Pub Dt:
|
01/10/2002
| | | | |
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Title:
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SEMICONDUCTOR WAFER MANUFACTURING PROCESS
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|
|
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Patent #:
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Issue Dt:
|
11/13/2001
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Application #:
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09489481
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Filing Dt:
|
01/21/2000
|
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Title:
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Continuous oxidation process for crystal pulling Apparatus
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|
|
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Patent #:
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|
Issue Dt:
|
08/17/2004
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Application #:
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09502340
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Filing Dt:
|
02/10/2000
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|
Title:
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METHOD OF CONTROLLING DIAMETER OF A SILICON CRYSTAL IN A LOCKED SEED LIFT GROWTH PROCESS
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|
|
|
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Patent #:
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|
Issue Dt:
|
02/05/2002
|
Application #:
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09503566
|
Filing Dt:
|
02/14/2000
|
|
Title:
|
Process for producing a silicon melt
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|
|
|
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Patent #:
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|
Issue Dt:
|
11/12/2002
|
Application #:
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09505269
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Filing Dt:
|
02/16/2000
|
|
Title:
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PROCESS FOR REDUCING SURFACE VARIATIONS FOR POLISHED WAFER
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|
|
|
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Patent #:
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|
Issue Dt:
|
04/23/2002
|
Application #:
|
09506105
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Filing Dt:
|
02/17/2000
|
|
Title:
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SEMICONDUCTOR WAFER MANUFACTURING PROCESS
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|
|
|
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Patent #:
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|
Issue Dt:
|
02/04/2003
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Application #:
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09507811
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Filing Dt:
|
02/22/2000
|
|
Title:
|
METHOD FOR WAFER PROCESSING
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|
|
|
|
Patent #:
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|
Issue Dt:
|
09/25/2001
|
Application #:
|
09512111
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Filing Dt:
|
02/24/2000
|
|
Title:
|
Silicon wafering process flow
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/20/2001
|
Application #:
|
09521288
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Filing Dt:
|
03/08/2000
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|
Title:
|
Barium doping of molten silicon for use in crystal growing process
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