Patent Assignment Details
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| Reel/Frame: | 032340/0255 | |
| Pages: | 4 |
| | Recorded: | 03/03/2014 | | |
| Attorney Dkt #: | LAMRP084/3304-1US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14195653
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Filing Dt:
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03/03/2014
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Publication #:
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Pub Dt:
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09/03/2015
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Title:
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RF CYCLE PURGING TO REDUCE SURFACE ROUGHNESS IN METAL OXIDE AND METAL NITRIDE FILMS
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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WEAVER AUSTIN VILLENEUVE & SAMPSON LLP
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P.O. BOX 70250
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OAKLAND, CA 94612-0250
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