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Reel/Frame:032346/0698   Pages: 5
Recorded: 03/04/2014
Attorney Dkt #:HITACHI12-20910160US02
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/20/2017
Application #:
14184051
Filing Dt:
02/19/2014
Publication #:
Pub Dt:
08/21/2014
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF CLEANING PROCESSING VESSEL
Assignors
1
Exec Dt:
04/27/2011
2
Exec Dt:
04/28/2011
3
Exec Dt:
04/28/2011
Assignees
1
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU
TOKYO, JAPAN 101-8980
2
75 QUAI D'ORSAY
PARIS, FRANCE 75321
Correspondence name and address
VOLPE AND KOENIG, P.C.
30 S. 17TH STREET
UNITED PLAZA
PHILADELPHIA, PA 19103

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