Patent Assignment Details
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| Reel/Frame: | 032505/0682 | |
| Pages: | 8 |
| | Recorded: | 03/24/2014 | | |
| Attorney Dkt #: | 11EL-002D1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14093058
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Filing Dt:
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11/29/2013
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Publication #:
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Pub Dt:
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03/27/2014
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Title:
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CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, CLUSTER BEAM GENERATING METHOD, AND SUBSTRATE PROCESSING METHOD
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Assignees
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| 10-1, SHIMOYAMATE-DORI 5-CHOME, CHUO-KU, KOBE-SHI, |
| HYOGO, JAPAN 650-8567 |
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| 3-1, AKASAKA 5-CHOME, MINATO-KU, |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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IPUSA, P.L.L.C
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1054 31ST STREET, N.W.
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SUITE 400
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WASHINGTON, DC 20007
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