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Reel/Frame:032505/0790   Pages: 10
Recorded: 03/24/2014
Attorney Dkt #:11EL-002D1
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
14093058
Filing Dt:
11/29/2013
Publication #:
Pub Dt:
03/27/2014
Title:
CLUSTER BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, CLUSTER BEAM GENERATING METHOD, AND SUBSTRATE PROCESSING METHOD
Assignors
1
Exec Dt:
02/27/2014
2
Exec Dt:
01/28/2014
Assignees
1
2-1, GAKUENNISHI-MACHI 8-CHOME, NISHI-KU, KOBE-SHI,
HYOGO, JAPAN 651-2197
2
3-1, AKASAKA 5-CHOME, MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondence name and address
IPUSA, P.L.L.C
1054 31ST STREET, N.W.
SUITE 400
WASHINGTON, DC 20007

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