Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 032716/0958 | |
| Pages: | 3 |
| | Recorded: | 04/21/2014 | | |
| Attorney Dkt #: | A21679/T117400 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/17/2015
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Application #:
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14231180
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Filing Dt:
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03/31/2014
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Publication #:
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Pub Dt:
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10/01/2015
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Title:
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HALOGEN-FREE GAS-PHASE SILICON ETCH
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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EUGENE J. BERNARD
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KILPATRICK TOWNSEND & STOCKTON LLP
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TWO EMBARCADERO CENTER - 8TH FLOOR
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SAN FRANCISCO, CA 94111
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