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796
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Patent #:
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Issue Dt:
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02/10/2015
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Application #:
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11916891
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Filing Dt:
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06/05/2008
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Publication #:
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Pub Dt:
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10/02/2008
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Title:
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METAL AND DIELECTRIC COMPATIBLE SACRIFICIAL ANTI-REFLECTIVE COATING CLEANING AND REMOVAL COMPOSITION
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11917453
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Filing Dt:
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04/03/2009
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Publication #:
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Pub Dt:
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08/27/2009
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Title:
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COMPOSITIONS AND METHODS FOR SELECTIVE REMOVAL OF METAL OR METAL ALLOY AFTER METAL SILICIDE FORMATION
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Patent #:
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Issue Dt:
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07/15/2014
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Application #:
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11919110
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Filing Dt:
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10/08/2008
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Publication #:
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Pub Dt:
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02/19/2009
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Title:
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Method and apparatus for treating fluids to reduce microbubbles
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Patent #:
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Issue Dt:
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06/16/2015
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Application #:
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11922551
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Filing Dt:
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03/11/2009
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Publication #:
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Pub Dt:
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12/31/2009
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Title:
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Filtration Module
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11924716
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Filing Dt:
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10/26/2007
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Publication #:
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Pub Dt:
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02/28/2008
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Title:
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SCALABLE LEAD ZIRCONIUM TITANATE (PZT) THIN FILM MATERIAL AND DEPOSITION METHOD, AND FERROELECTRIC MEMORY DEVICE STRUCTURES COMPRISING SUCH THIN FILM MATERIAL
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Patent #:
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Issue Dt:
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11/08/2011
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Application #:
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11925838
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Filing Dt:
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10/27/2007
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Title:
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SUPER-DRY REAGENT COMPOSITIONS FOR FORMATION OF ULTRA LOW K FILMS
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Patent #:
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Issue Dt:
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02/10/2009
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Application #:
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11930031
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Filing Dt:
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10/30/2007
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Publication #:
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Pub Dt:
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03/06/2008
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Title:
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METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
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Patent #:
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Issue Dt:
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04/26/2011
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Application #:
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11937626
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Filing Dt:
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11/09/2007
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Publication #:
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Pub Dt:
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03/20/2008
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Title:
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SYSTEM, METHOD, AND APPARATUS FOR CONVERSION BONDING OF PRECURSOR SUBCOMPONENTS INTO A UNITARY MONOLITH
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Patent #:
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Issue Dt:
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12/20/2011
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Application #:
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11937931
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Filing Dt:
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11/09/2007
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Publication #:
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Pub Dt:
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03/20/2008
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Title:
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SYSTEM FOR CONTROLLING VALVE FLUID FLOW BASED ON RATE OF CHANGE OF CLOSE RATE ACCELERATION
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Patent #:
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Issue Dt:
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04/26/2011
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Application #:
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11938877
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Filing Dt:
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11/13/2007
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Publication #:
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Pub Dt:
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05/15/2008
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Title:
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CHEMICAL MECHANICAL PLANARIZATION PAD
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|
|
|
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Patent #:
|
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Issue Dt:
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04/25/2017
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Application #:
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11948585
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Filing Dt:
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11/30/2007
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Publication #:
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Pub Dt:
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06/05/2008
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Title:
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SYSTEM AND METHOD FOR OPERATION OF A PUMP
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Patent #:
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Issue Dt:
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01/10/2012
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Application #:
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11981082
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Filing Dt:
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10/31/2007
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Publication #:
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Pub Dt:
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06/12/2008
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Title:
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EXCHANGE APPARATUS
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Patent #:
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Issue Dt:
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05/19/2009
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Application #:
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12001112
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Filing Dt:
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12/10/2007
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Publication #:
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Pub Dt:
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06/26/2008
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Title:
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POROUS SINTERED COMPOSITE MATERIALS
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Patent #:
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Issue Dt:
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07/06/2010
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Application #:
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12013433
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Filing Dt:
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01/12/2008
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Publication #:
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Pub Dt:
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02/05/2009
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Title:
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TANTALUM AMIDO-COMPLEXES WITH CHELATE LIGANDS USEFUL FOR CVD AND ALD OF TAN AND TA205 THIN FILMS
|
|
|
|
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Patent #:
|
|
Issue Dt:
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01/04/2011
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Application #:
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12019557
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Filing Dt:
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01/24/2008
|
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Publication #:
|
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Pub Dt:
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07/03/2008
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Title:
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MONOSILANE OR DISILANE DERIVATIVES AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS USING THE SAME
|
|
|
|
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Patent #:
|
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Issue Dt:
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05/20/2014
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Application #:
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12026336
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Filing Dt:
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02/05/2008
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Publication #:
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Pub Dt:
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05/29/2008
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Title:
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SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY
|
|
|
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Patent #:
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Issue Dt:
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11/06/2012
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Application #:
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12026414
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Filing Dt:
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02/05/2008
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Publication #:
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Pub Dt:
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10/16/2008
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Title:
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HIGH THROUGHPUT CHEMICAL MECHANICAL POLISHING COMPOSITION FOR METAL FILM PLANARIZATION
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|
|
|
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Patent #:
|
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Issue Dt:
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04/03/2012
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Application #:
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12039700
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Filing Dt:
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02/28/2008
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Publication #:
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Pub Dt:
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08/28/2008
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Title:
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PURGE SYSTEM FOR A SUBSTRATE CONTAINER
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Patent #:
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Issue Dt:
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05/18/2010
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Application #:
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12050247
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Filing Dt:
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03/18/2008
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Publication #:
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Pub Dt:
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07/03/2008
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Title:
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HOLLOW FIBER MEMBRANE CONTACT APPARATUS AND PROCESS
|
|
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Patent #:
|
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Issue Dt:
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06/21/2011
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Application #:
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12058751
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Filing Dt:
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03/30/2008
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Publication #:
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Pub Dt:
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10/02/2008
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Title:
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COPPER PRECURSORS FOR CVD/ALD/DIGITAL CVD OF COPPER METAL FILMS
|
|
|
|
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Patent #:
|
|
Issue Dt:
|
05/25/2010
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Application #:
|
12060686
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Filing Dt:
|
04/01/2008
|
|
Publication #:
|
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Pub Dt:
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02/12/2009
| | | | |
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Title:
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MONITORING SYSTEM COMPRISING INFRARED THERMOPILE DETECTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/2011
|
Application #:
|
12065503
|
Filing Dt:
|
06/14/2008
|
|
Publication #:
|
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Pub Dt:
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10/09/2008
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Title:
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BORON ION IMPLANTATION USING ALTERNATIVE FLUORINATED BORON PRECURSORS, AND FORMATION OF LARGE BORON HYDRIDES FOR IMPLANATION
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12087914
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Filing Dt:
|
07/17/2008
|
|
Publication #:
|
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Pub Dt:
|
10/21/2010
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|
Title:
|
Nanotube Polymer Composite Composition and Methods of Making
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/31/2012
|
Application #:
|
12088120
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Filing Dt:
|
09/11/2008
|
|
Publication #:
|
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Pub Dt:
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12/10/2009
| | | | |
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Title:
|
RETICLE POD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2011
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Application #:
|
12089288
|
Filing Dt:
|
08/05/2008
|
|
Publication #:
|
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Pub Dt:
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08/27/2009
| | | | |
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Title:
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OXIDIZING AQUEOUS CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12089346
|
Filing Dt:
|
06/27/2008
|
|
Publication #:
|
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Pub Dt:
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02/05/2009
| | | | |
|
Title:
|
COMPOSITION AND METHOD FOR SELECTIVELY ETCHING GATE SPACER OXIDE MATERIAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/15/2011
|
Application #:
|
12090213
|
Filing Dt:
|
10/06/2008
|
|
Publication #:
|
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Pub Dt:
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05/07/2009
| | | | |
|
Title:
|
METALS COMPATIBLE POST-ETCH PHOTORESIST REMOVER AND/OR SACRIFICIAL ANTIREFLECTIVE COATING ETCHANT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/14/2011
|
Application #:
|
12093290
|
Filing Dt:
|
05/09/2008
|
|
Publication #:
|
|
Pub Dt:
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10/23/2008
| | | | |
|
Title:
|
COMPOSITION AND METHOD FOR RECYCLING SEMICONDUCTOR WAFERS HAVING LOW-K DIELECTRIC MATERIALS THEREON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/2012
|
Application #:
|
12095775
|
Filing Dt:
|
06/02/2008
|
|
Publication #:
|
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Pub Dt:
|
02/19/2009
| | | | |
|
Title:
|
MOLDED ROTATABLE BASE FOR A POROUS PAD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/04/2010
|
Application #:
|
12119463
|
Filing Dt:
|
05/12/2008
|
|
Publication #:
|
|
Pub Dt:
|
01/01/2009
| | | | |
|
Title:
|
TANTALUM AMIDE COMPLEXES FOR DEPOSITING TANTALUM-CONTAINING FILMS, AND METHOD OF MAKING SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/04/2010
|
Application #:
|
12120101
|
Filing Dt:
|
05/13/2008
|
|
Publication #:
|
|
Pub Dt:
|
09/04/2008
| | | | |
|
Title:
|
PHOTOMETRICALLY MODULATED DELIVERY OF REAGENTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/08/2014
|
Application #:
|
12160037
|
Filing Dt:
|
12/04/2008
|
|
Publication #:
|
|
Pub Dt:
|
10/01/2009
| | | | |
|
Title:
|
WELDED DIAPHRAGM VALVE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/04/2011
|
Application #:
|
12182880
|
Filing Dt:
|
07/30/2008
|
|
Publication #:
|
|
Pub Dt:
|
12/11/2008
| | | | |
|
Title:
|
NANOPOROUS ARTICLES AND METHODS OF MAKING SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/13/2010
|
Application #:
|
12186490
|
Filing Dt:
|
08/05/2008
|
|
Publication #:
|
|
Pub Dt:
|
11/27/2008
| | | | |
|
Title:
|
GAS DELIVERY SYSTEM WITH INTEGRATED VALVE MANIFOLD FUNCTIONALITY FOR SUB-ATMOSPHERIC AND SUPER-ATMOSPHERIC PRESSURE APPLICATIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/30/2014
|
Application #:
|
12200590
|
Filing Dt:
|
08/28/2008
|
|
Publication #:
|
|
Pub Dt:
|
03/05/2009
| | | | |
|
Title:
|
A PRESSURIZED SYSTEM FOR DISPENSING FLUIDS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/06/2011
|
Application #:
|
12215539
|
Filing Dt:
|
06/27/2008
|
|
Publication #:
|
|
Pub Dt:
|
07/23/2009
| | | | |
|
Title:
|
FILTRATION MODULE INCLUDING UNITARY FILTER CARTRIDGE-BOWL CONSTRUCTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/17/2014
|
Application #:
|
12218325
|
Filing Dt:
|
07/14/2008
|
|
Publication #:
|
|
Pub Dt:
|
02/19/2009
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR HIGH VISCOSITY PUMP
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/07/2012
|
Application #:
|
12234199
|
Filing Dt:
|
09/19/2008
|
|
Publication #:
|
|
Pub Dt:
|
05/28/2009
| | | | |
|
Title:
|
METHOD OF PASSIVATING CHEMICAL MECHANICAL POLISHING COMPOSITIONS FOR COPPER FILM PLANARIZATION PROCESSES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/2010
|
Application #:
|
12247120
|
Filing Dt:
|
10/07/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/02/2009
| | | | |
|
Title:
|
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/08/2011
|
Application #:
|
12253732
|
Filing Dt:
|
10/17/2008
|
|
Publication #:
|
|
Pub Dt:
|
05/07/2009
| | | | |
|
Title:
|
FLUID FLOW MEASURING AND PROPORTIONAL FLUID FLOW CONTROL DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/2012
|
Application #:
|
12263403
|
Filing Dt:
|
10/31/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/30/2009
| | | | |
|
Title:
|
AMORPHOUS GE/TE DEPOSITION PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/23/2012
|
Application #:
|
12278255
|
Filing Dt:
|
12/04/2008
|
|
Publication #:
|
|
Pub Dt:
|
09/03/2009
| | | | |
|
Title:
|
SHOCK ABSORBING SUBSTRATE CONTAINER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/2011
|
Application #:
|
12281941
|
Filing Dt:
|
12/10/2008
|
|
Publication #:
|
|
Pub Dt:
|
05/21/2009
| | | | |
|
Title:
|
FLUID HANDLING DEVICE WITH ISOLATING CHAMBER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/29/2009
|
Application #:
|
12282511
|
Filing Dt:
|
10/08/2008
|
|
Publication #:
|
|
Pub Dt:
|
03/19/2009
| | | | |
|
Title:
|
PRECURSOR COMPOSITIONS FOR ATOMIC LAYER DEPOSITION AND CHEMICAL VAPOR DEPOSITION OF TITANATE, LANTHANATE, AND TANTALATE DIELECTRIC FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/21/2011
|
Application #:
|
12295727
|
Filing Dt:
|
10/07/2008
|
|
Publication #:
|
|
Pub Dt:
|
12/23/2010
| | | | |
|
Title:
|
ATMOSPHERIC PRESSURE MICROWAVE PLASMA TREATED POROUS MEMBRANES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/10/2013
|
Application #:
|
12298727
|
Filing Dt:
|
01/19/2010
|
|
Publication #:
|
|
Pub Dt:
|
06/24/2010
| | | | |
|
Title:
|
CLEANING OF SEMICONDUCTOR PROCESSING SYSTEMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/16/2012
|
Application #:
|
12300459
|
Filing Dt:
|
12/22/2008
|
|
Publication #:
|
|
Pub Dt:
|
05/14/2009
| | | | |
|
Title:
|
LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/20/2012
|
Application #:
|
12302287
|
Filing Dt:
|
06/24/2009
|
|
Publication #:
|
|
Pub Dt:
|
12/03/2009
| | | | |
|
Title:
|
BARRIER FLUOROPOLYMER FILM-BASED LINERS AND PACKAGING COMPRISING SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/10/2013
|
Application #:
|
12303789
|
Filing Dt:
|
08/03/2010
|
|
Publication #:
|
|
Pub Dt:
|
12/09/2010
| | | | |
|
Title:
|
REUSABLE RESILIENT CUSHION FOR WAFER CONTAINER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/25/2012
|
Application #:
|
12304765
|
Filing Dt:
|
02/10/2009
|
|
Publication #:
|
|
Pub Dt:
|
06/03/2010
| | | | |
|
Title:
|
LIQUID DISPENSING SYSTEMS ENCOMPASSING GAS REMOVAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2014
|
Application #:
|
12305895
|
Filing Dt:
|
07/21/2010
|
|
Publication #:
|
|
Pub Dt:
|
11/25/2010
| | | | |
|
Title:
|
SYSTEM FOR PURGING RETICLE STORAGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/23/2010
|
Application #:
|
12307101
|
Filing Dt:
|
02/20/2009
|
|
Publication #:
|
|
Pub Dt:
|
12/10/2009
| | | | |
|
Title:
|
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/12/2015
|
Application #:
|
12307957
|
Filing Dt:
|
04/07/2009
|
|
Publication #:
|
|
Pub Dt:
|
01/07/2010
| | | | |
|
Title:
|
SYSTEMS AND METHODS FOR MANAGING MATERIAL STORAGE VESSELS HAVING INFORMATION STORAGE ELEMENTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2011
|
Application #:
|
12309167
|
Filing Dt:
|
01/09/2009
|
|
Publication #:
|
|
Pub Dt:
|
12/31/2009
| | | | |
|
Title:
|
FILTERING SYSTEM FOR A SEMICONDUCTOR PROCESSING TOOL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2012
|
Application #:
|
12356818
|
Filing Dt:
|
01/21/2009
|
|
Publication #:
|
|
Pub Dt:
|
07/23/2009
| | | | |
|
Title:
|
APPARATUS AND METHOD FOR REDUCING PARTICLE CONTAMINATION IN A VACUUM CHAMBER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/09/2010
|
Application #:
|
12358723
|
Filing Dt:
|
01/23/2009
|
|
Publication #:
|
|
Pub Dt:
|
05/28/2009
| | | | |
|
Title:
|
METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/28/2010
|
Application #:
|
12364800
|
Filing Dt:
|
02/03/2009
|
|
Publication #:
|
|
Pub Dt:
|
11/05/2009
| | | | |
|
Title:
|
SEMICONDUCTOR MANUFACTURING FACILITY UTILIZING EXHAUST RECIRCULATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/20/2014
|
Application #:
|
12373840
|
Filing Dt:
|
06/19/2009
|
|
Publication #:
|
|
Pub Dt:
|
10/15/2009
| | | | |
|
Title:
|
VALVE MANIFOLD ASSEMBLY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/23/2011
|
Application #:
|
12392077
|
Filing Dt:
|
02/24/2009
|
|
Publication #:
|
|
Pub Dt:
|
07/30/2009
| | | | |
|
Title:
|
GAS STORAGE AND DISPENSING SYSTEM WITH MONOLITHIC CARBON ADSORBENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/05/2011
|
Application #:
|
12401325
|
Filing Dt:
|
03/10/2009
|
|
Publication #:
|
|
Pub Dt:
|
07/09/2009
| | | | |
|
Title:
|
RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/01/2014
|
Application #:
|
12409267
|
Filing Dt:
|
03/23/2009
|
|
Publication #:
|
|
Pub Dt:
|
09/24/2009
| | | | |
|
Title:
|
ANTIOXIDANTS FOR POST-CMP CLEANING FORMULATIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/27/2011
|
Application #:
|
12434321
|
Filing Dt:
|
05/01/2009
|
|
Publication #:
|
|
Pub Dt:
|
11/12/2009
| | | | |
|
Title:
|
LOW PH MIXTURES FOR THE REMOVAL OF HIGH DENSITY IMPLANTED RESIST
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/2011
|
Application #:
|
12438049
|
Filing Dt:
|
04/01/2009
|
|
Publication #:
|
|
Pub Dt:
|
01/07/2010
| | | | |
|
Title:
|
FILTER APPARATUS CAPABLE OF RELEASING AIR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/02/2014
|
Application #:
|
12438502
|
Filing Dt:
|
06/02/2009
|
|
Publication #:
|
|
Pub Dt:
|
10/07/2010
| | | | |
|
Title:
|
SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS MORPHOLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/10/2017
|
Application #:
|
12454336
|
Filing Dt:
|
05/15/2009
|
|
Publication #:
|
|
Pub Dt:
|
11/19/2009
| | | | |
|
Title:
|
ELECTROSTATIC CHUCK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/27/2011
|
Application #:
|
12454611
|
Filing Dt:
|
05/20/2009
|
|
Publication #:
|
|
Pub Dt:
|
09/17/2009
| | | | |
|
Title:
|
LIQUID FLOW CONTROLLER AND PRECISION DISPENSE APPARATUS AND SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/31/2010
|
Application #:
|
12464726
|
Filing Dt:
|
05/12/2009
|
|
Publication #:
|
|
Pub Dt:
|
11/12/2009
| | | | |
|
Title:
|
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS SUCH AS FILMS INCLUDING SILICON, SILICON NITRIDE, SILICON DIOXIDE AND/OR SILICON-OXYNITRIDE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/10/2013
|
Application #:
|
12469662
|
Filing Dt:
|
05/20/2009
|
|
Publication #:
|
|
Pub Dt:
|
11/25/2010
| | | | |
|
Title:
|
SENSING SYSTEM AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/01/2012
|
Application #:
|
12507048
|
Filing Dt:
|
07/21/2009
|
|
Publication #:
|
|
Pub Dt:
|
01/28/2010
| | | | |
|
Title:
|
PRECURSORS FOR CVD/ALD OF METAL-CONTAINING FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/05/2010
|
Application #:
|
12509970
|
Filing Dt:
|
07/27/2009
|
|
Publication #:
|
|
Pub Dt:
|
11/19/2009
| | | | |
|
Title:
|
LOW-PROFILE SURFACE MOUNT FILTER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/06/2011
|
Application #:
|
12515606
|
Filing Dt:
|
06/09/2009
|
|
Publication #:
|
|
Pub Dt:
|
01/21/2010
| | | | |
|
Title:
|
DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12520121
|
Filing Dt:
|
02/08/2010
|
|
Publication #:
|
|
Pub Dt:
|
07/01/2010
| | | | |
|
Title:
|
LIQUID CLEANER FOR THE REMOVAL OF POST-ETCH RESIDUES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2014
|
Application #:
|
12520138
|
Filing Dt:
|
03/02/2010
|
|
Publication #:
|
|
Pub Dt:
|
07/15/2010
| | | | |
|
Title:
|
COMPOSITIONS AND METHODS FOR THE SELECTIVE REMOVAL OF SILICON NITRIDE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/03/2013
|
Application #:
|
12523704
|
Filing Dt:
|
08/17/2009
|
|
Publication #:
|
|
Pub Dt:
|
04/22/2010
| | | | |
|
Title:
|
PRECURSOR COMPOSITIONS FOR ALD/CVD OF GROUP II RUTHENATE THIN FILMS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12525600
|
Filing Dt:
|
10/01/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/18/2010
| | | | |
|
Title:
|
COMPOSITION AND PROCESS FOR THE SELECTIVE REMOVE OF TiSiN
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/07/2012
|
Application #:
|
12537910
|
Filing Dt:
|
08/07/2009
|
|
Publication #:
|
|
Pub Dt:
|
12/10/2009
| | | | |
|
Title:
|
APPARATUS AND PROCESS FOR SENSING FLUORO SPECIES IN SEMICONDUCTOR PROCESSING SYSTEMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/24/2010
|
Application #:
|
12578262
|
Filing Dt:
|
10/13/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/18/2010
| | | | |
|
Title:
|
COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITION OF SILICON-CONTAINING FILMS INCLUDING SILICON CARBONITRIDE AND SILICON OXYCARBONITRIDE FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/23/2012
|
Application #:
|
12581843
|
Filing Dt:
|
10/19/2009
|
|
Publication #:
|
|
Pub Dt:
|
02/11/2010
| | | | |
|
Title:
|
AQUEOUS CLEANING COMPOSITION CONTAINING COPPER-SPECIFIC CORROSION INHIBITOR FOR CLEANING INORGANIC RESIDUES ON SEMICONDUCTOR SUBSTRATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/2010
|
Application #:
|
12615722
|
Filing Dt:
|
11/10/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/11/2010
| | | | |
|
Title:
|
PRESSURE-BASED GAS DELIVERY SYSTEM AND METHOD FOR REDUCING RISKS ASSOCIATED WITH STORAGE AND DELIVERY OF HIGH PRESSURE GASES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/26/2012
|
Application #:
|
12619165
|
Filing Dt:
|
11/16/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/11/2010
| | | | |
|
Title:
|
PRECURSOR COMPOSITIONS FOR ATOMIC LAYER DEPOSITION AND CHEMICAL VAPOR DEPOSITION OF TITANATE, LANTHANATE, AND TANTALATE DIELECTRIC FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/05/2013
|
Application #:
|
12636015
|
Filing Dt:
|
12/11/2009
|
|
Publication #:
|
|
Pub Dt:
|
06/16/2011
| | | | |
|
Title:
|
REMOVAL OF MASKING MATERIAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/10/2016
|
Application #:
|
12665929
|
Filing Dt:
|
02/05/2010
|
|
Publication #:
|
|
Pub Dt:
|
07/01/2010
| | | | |
|
Title:
|
PRECURSORS FOR SILICON DIOXIDE GAP FILL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/24/2013
|
Application #:
|
12666208
|
Filing Dt:
|
09/29/2010
|
|
Publication #:
|
|
Pub Dt:
|
03/03/2011
| | | | |
|
Title:
|
COMPONENT FOR SOLAR ADSORPTION REFRIGERATION SYSTEM AND METHOD OF MAKING SUCH COMPONENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/04/2013
|
Application #:
|
12672684
|
Filing Dt:
|
07/26/2010
|
|
Publication #:
|
|
Pub Dt:
|
11/18/2010
| | | | |
|
Title:
|
STRONTIUM PRECURSOR FOR USE IN CHEMICAL VAPOR DEPOSITION, ATOMIC LAYER DEPOSITION AND RAPID VAPOR DEPOSITION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/04/2014
|
Application #:
|
12705587
|
Filing Dt:
|
02/13/2010
|
|
Publication #:
|
|
Pub Dt:
|
08/19/2010
| | | | |
|
Title:
|
IN SITU GENERATION OF RUO4 FOR ALD OF RU AND RU RELATED MATERIALS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/03/2012
|
Application #:
|
12707449
|
Filing Dt:
|
02/17/2010
|
|
Publication #:
|
|
Pub Dt:
|
06/17/2010
| | | | |
|
Title:
|
LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/17/2014
|
Application #:
|
12709054
|
Filing Dt:
|
02/19/2010
|
|
Publication #:
|
|
Pub Dt:
|
02/02/2012
| | | | |
|
Title:
|
NON-AMINE POST-CMP COMPOSITION AND METHOD OF USE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/01/2014
|
Application #:
|
12714126
|
Filing Dt:
|
02/26/2010
|
|
Publication #:
|
|
Pub Dt:
|
09/01/2011
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR CONTROLLING OPERATION OF A PUMP BASED ON FILTER INFORMATION IN A FILTER INFORMATION TAG
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/20/2014
|
Application #:
|
12714148
|
Filing Dt:
|
02/26/2010
|
|
Publication #:
|
|
Pub Dt:
|
09/01/2011
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR OPTIMIZING OPERATION OF A PUMP
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12741153
|
Filing Dt:
|
08/11/2010
|
|
Publication #:
|
|
Pub Dt:
|
12/09/2010
| | | | |
|
Title:
|
INTEGRAL FACE SEAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/15/2012
|
Application #:
|
12743099
|
Filing Dt:
|
08/16/2010
|
|
Publication #:
|
|
Pub Dt:
|
01/13/2011
| | | | |
|
Title:
|
SOLVENT-FREE SYNTHESIS OF SOLUBLE NANOCRYSTALS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12745605
|
Filing Dt:
|
02/15/2011
|
|
Publication #:
|
|
Pub Dt:
|
08/04/2011
| | | | |
|
Title:
|
Blow Molded Liner for Overpack Container and Method of Manufacturing the Same
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/04/2011
|
Application #:
|
12768374
|
Filing Dt:
|
04/27/2010
|
|
Publication #:
|
|
Pub Dt:
|
08/19/2010
| | | | |
|
Title:
|
SCALABLE LEAD ZIRCONIUM TITANATE (PZT) THIN FILM MATERIAL AND DEPOSITION METHOD, AND FERROELECTRIC MEMORY DEVICE STRUCTURES COMPRISING SUCH THIN FILM MATERIAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/23/2010
|
Application #:
|
12773650
|
Filing Dt:
|
05/04/2010
|
|
Publication #:
|
|
Pub Dt:
|
08/26/2010
| | | | |
|
Title:
|
TANTALUM AMIDE COMPLEXES FOR DEPOSITING TANTALUM-CONTAINING FILMS, AND METHOD OF MAKING SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2011
|
Application #:
|
12773666
|
Filing Dt:
|
05/04/2010
|
|
Publication #:
|
|
Pub Dt:
|
08/26/2010
| | | | |
|
Title:
|
PHOTOMETRICALLY MODULATED DELIVERY OF REAGENTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/13/2011
|
Application #:
|
12777019
|
Filing Dt:
|
05/10/2010
|
|
Publication #:
|
|
Pub Dt:
|
09/23/2010
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR FLOW MONITORING AND CONTROL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/15/2011
|
Application #:
|
12777519
|
Filing Dt:
|
05/11/2010
|
|
Publication #:
|
|
Pub Dt:
|
09/02/2010
| | | | |
|
Title:
|
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/28/2010
|
Application #:
|
12790835
|
Filing Dt:
|
05/30/2010
|
|
Publication #:
|
|
Pub Dt:
|
09/23/2010
| | | | |
|
Title:
|
TANTALUM AMIDO-COMPLEXES WITH CHELATE LIGANDS USEFUL FOR CVD AND ALD OF TAN AND TA205 THIN FILMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/02/2013
|
Application #:
|
12824749
|
Filing Dt:
|
06/28/2010
|
|
Publication #:
|
|
Pub Dt:
|
01/06/2011
| | | | |
|
Title:
|
HOLLOW GST STRUCTURE WITH DIELECTRIC FILL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/22/2011
|
Application #:
|
12838441
|
Filing Dt:
|
07/17/2010
|
|
Publication #:
|
|
Pub Dt:
|
11/11/2010
| | | | |
|
Title:
|
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS SUCH AS FILMS INCLUDING SILICON, SILICON NITRIDE, SILICON DIOXIDE AND/OR SILICON-OXYNITRIDE
|
|
