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07/08/2010
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07/08/2010
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07/08/2010
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07/22/2010
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05/14/2009
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08/05/2010
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08/19/2010
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09/16/2010
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10/28/2010
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11/11/2010
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11/11/2010
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06/24/2009
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12/30/2010
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01/14/2014
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12/30/2010
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05/17/2011
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06/30/2009
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12/30/2010
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05/03/2016
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06/30/2009
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12/30/2010
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12/08/2015
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06/30/2009
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12/30/2010
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05/24/2011
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06/30/2009
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12/30/2010
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07/15/2014
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06/30/2009
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12/30/2010
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07/19/2011
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06/30/2009
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12/30/2010
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10/02/2012
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01/06/2011
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01/13/2011
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02/15/2011
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01/20/2011
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02/03/2011
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02/03/2011
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02/01/2011
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08/26/2010
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02/03/2011
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12/17/2013
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02/17/2011
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01/22/2013
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02/24/2011
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05/11/2010
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12/17/2009
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12/04/2012
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02/24/2011
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06/21/2011
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12/24/2009
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10/11/2011
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03/03/2011
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03/10/2011
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03/10/2011
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03/27/2012
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03/10/2011
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07/31/2012
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09/11/2009
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03/17/2011
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01/07/2010
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03/17/2011
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02/15/2011
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12/30/2010
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04/09/2013
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04/14/2011
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10/15/2009
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02/11/2010
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04/21/2011
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04/28/2011
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06/21/2016
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05/05/2011
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05/12/2011
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05/19/2011
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05/19/2011
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11/18/2009
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05/19/2011
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05/26/2011
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08/15/2017
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05/26/2011
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12/11/2012
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05/26/2011
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MICROMACHINED TRANSDUCERS AND METHOD OF FABRICATION
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