Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 032857/0747 | |
| Pages: | 6 |
| | Recorded: | 05/09/2014 | | |
| Attorney Dkt #: | 021237/ETCH/CONE/MD |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/31/2017
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Application #:
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14158112
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Filing Dt:
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01/17/2014
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Publication #:
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Pub Dt:
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05/21/2015
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Title:
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CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FORCES APPLIED BY ELECTROSTATIC CHUCKS, AND RELATED METHODS
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PATTERSON & SHERIDAN, LLP/APPM
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3040 POST OAK BLVD.
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SUITE 1500
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HOUSTON, TX 77056-6582
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