Total properties:
274
Page
1
of
3
Pages:
1 2 3
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/25/1997
|
Application #:
|
08242560
|
Filing Dt:
|
05/13/1994
|
|
Title:
|
SEMICONDUCTOR WAFER POLISHING APPARATUS AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/05/1996
|
Application #:
|
08245592
|
Filing Dt:
|
05/18/1994
|
|
Title:
|
METHOD OF ROUGH POLISHING SEMICONDUCTOR WAFERS TO REDUCE SURFACE ROUGHNESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/12/1996
|
Application #:
|
08283782
|
Filing Dt:
|
08/01/1994
|
|
Title:
|
METHOD FOR ETCHING A SEMICONDUCTOR MATERIAL WITHOUT ALTERING FLOW PATTERN DEFECT DISTRIBUTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/14/1997
|
Application #:
|
08403301
|
Filing Dt:
|
03/14/1995
|
|
Title:
|
PRECISION CONTROLLED PRECIPITATION OF OXYGEN IN SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/21/1996
|
Application #:
|
08423363
|
Filing Dt:
|
04/18/1995
|
|
Title:
|
SUSCEPTOR AND BAFFLE THEREFOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/05/1997
|
Application #:
|
08459765
|
Filing Dt:
|
06/02/1995
|
|
Title:
|
METHOD FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/26/1996
|
Application #:
|
08483304
|
Filing Dt:
|
06/07/1995
|
|
Title:
|
A SILICON SINGLE CRYSTAL HAVING ELIMINATED DISCLOCATION IN ITS NECK CRYSTAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/14/1997
|
Application #:
|
08488924
|
Filing Dt:
|
06/09/1995
|
|
Title:
|
APPARATUS FOR ROTATING A CRUCIBLE OF A CRYSTAL PULLING MACHINE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/1999
|
Application #:
|
08490465
|
Filing Dt:
|
06/14/1995
|
|
Title:
|
SURFACE-TREATED CRUCIBLES FOR IMPROVED ZERO DISLOCATION PERFORMANCE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/09/1999
|
Application #:
|
08490473
|
Filing Dt:
|
06/14/1995
|
|
Title:
|
METHODS FOR IMPROVING ZERO DISLOCATION YIELD OF SINGLE CRYSTALS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/31/1996
|
Application #:
|
08507055
|
Filing Dt:
|
07/25/1995
|
|
Title:
|
METHOD FOR PREPARING MOLTEN SILICON MELT FROM POLYCRYSTALLINE SILICON CHARGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/01/1999
|
Application #:
|
08530612
|
Filing Dt:
|
09/20/1995
|
|
Title:
|
METHOD FOR TUNING BARREL REACTOR PURGE SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/12/1997
|
Application #:
|
08558609
|
Filing Dt:
|
11/14/1995
|
|
Title:
|
NON-DISTORTING VIDEO CAMERA FOR USE WITH A SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/27/1998
|
Application #:
|
08568997
|
Filing Dt:
|
12/07/1995
|
|
Title:
|
PRE-THERMAL TREATMENT CLEANING PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/24/1998
|
Application #:
|
08589612
|
Filing Dt:
|
01/22/1996
|
|
Title:
|
APPARATUS FOR CONTROLLING NUCLEATION OF OXYGEN PRECIPITATES IN SILICON CRYSTALS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/29/1998
|
Application #:
|
08595075
|
Filing Dt:
|
02/01/1996
|
|
Title:
|
METHOD FOR PREPARING MOLTEN SILICON MELT FROM POLYCRYSTALLINE SILICON CHARGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/1997
|
Application #:
|
08620137
|
Filing Dt:
|
03/21/1996
|
|
Title:
|
SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/24/1998
|
Application #:
|
08639185
|
Filing Dt:
|
04/26/1996
|
|
Title:
|
APPARATUS AND METHOD FOR SHAPING POLISHING PADS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/01/1998
|
Application #:
|
08644181
|
Filing Dt:
|
05/10/1996
|
|
Title:
|
METHOD AND APPARATUS FOR AIMING A BARREL REACTOR NOZZLE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/21/1997
|
Application #:
|
08653666
|
Filing Dt:
|
05/31/1996
|
|
Title:
|
AUTOMATED WAFER LAPPING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/13/1997
|
Application #:
|
08675550
|
Filing Dt:
|
07/03/1996
|
|
Title:
|
PROCESS FOR ELIMINATING DISLOCATIONS IN THE NECK OF A SILICON SINGLE CRYSTAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/15/1998
|
Application #:
|
08686565
|
Filing Dt:
|
07/26/1996
|
|
Title:
|
COOLING SYSTEM AND METHOD FOR EPITAXIAL BARREL REACTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/11/1998
|
Application #:
|
08686570
|
Filing Dt:
|
07/26/1996
|
|
Title:
|
POLYSILICON PARTICLE CLASSIFYING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/04/1998
|
Application #:
|
08689432
|
Filing Dt:
|
08/09/1996
|
|
Title:
|
METHOD AND APPARATUS FOR CONTROLLING FLATNESS OF POLISHED SEMICONDUCTOR WAFER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/14/1998
|
Application #:
|
08694157
|
Filing Dt:
|
08/08/1996
|
|
Title:
|
PROCESS FOR CONTROLLING THERMAL HISTORY OF CZOCHRALSKI-GROWN SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/27/1998
|
Application #:
|
08710655
|
Filing Dt:
|
09/20/1996
|
|
Title:
|
CUTTING MACHINE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/18/1998
|
Application #:
|
08711085
|
Filing Dt:
|
09/09/1996
|
|
Title:
|
SIO PROBE FOR REAL-TIME MONITORING AND CONTROL OF OXYGEN DURING CZOCHRALSKI GROWTH OF SINGLE CRYSTAL SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/16/1998
|
Application #:
|
08725861
|
Filing Dt:
|
10/04/1996
|
|
Title:
|
A METHOD FOR ROTATING A CRUCIBLE OF A CRYSTAL PULLING MACHINE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/18/1999
|
Application #:
|
08732527
|
Filing Dt:
|
10/15/1996
|
|
Title:
|
PROCESS FOR CONTROLLING THE OXYGEN CONTENT IN SILICON WAFERS HEAVILY DOPED WITH ANTIMONY OR ARSENIC
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/05/1999
|
Application #:
|
08739550
|
Filing Dt:
|
10/30/1996
|
|
Title:
|
GETTERING AGENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/23/1998
|
Application #:
|
08764458
|
Filing Dt:
|
11/12/1996
|
|
Title:
|
POLISHING BLOCK HEATER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/06/1998
|
Application #:
|
08843632
|
Filing Dt:
|
04/10/1997
|
|
Title:
|
APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/11/1998
|
Application #:
|
08863960
|
Filing Dt:
|
05/27/1997
|
|
Title:
|
SECONDARY EDGE REFLECTOR FOR HORIZONTAL REACTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/28/1999
|
Application #:
|
08895388
|
Filing Dt:
|
07/16/1997
|
|
Title:
|
METHOD AND APPARATUS FOR CUTTING AN INGOT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/08/1998
|
Application #:
|
08896177
|
Filing Dt:
|
07/17/1997
|
|
Title:
|
METHOD AND SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/24/1999
|
Application #:
|
08904943
|
Filing Dt:
|
08/01/1997
|
|
Title:
|
HEAT SHIELD ASSEMBLY AND METHOD OF GROWING VACANCY RICH SINGLE CRYSTAL SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/23/1999
|
Application #:
|
08907795
|
Filing Dt:
|
08/08/1997
|
|
Title:
|
NON-DASH NECK METHOD FOR SINGLE CRYSTAL SILICON GROWTH
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/16/1999
|
Application #:
|
08934946
|
Filing Dt:
|
09/22/1997
|
|
Title:
|
PROCESS FOR THE PREPARATION OF SILICON WAFERS HAVING A CONTROLLED DISTRIBUTION OF OXYGEN PRECIPITATE NUCLEATION CENTERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/16/1999
|
Application #:
|
08939802
|
Filing Dt:
|
09/30/1997
|
|
Title:
|
METHOD AND SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/13/1999
|
Application #:
|
08940166
|
Filing Dt:
|
09/30/1997
|
|
Title:
|
HEAT SHIELD FOR CRYSTAL PULLER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/02/1999
|
Application #:
|
08941777
|
Filing Dt:
|
09/30/1997
|
|
Title:
|
WAFER DEMOUNT APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/25/1999
|
Application #:
|
08950842
|
Filing Dt:
|
10/15/1997
|
|
Title:
|
RADIANT POLISHING BLOCK HEATER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/24/1998
|
Application #:
|
08970129
|
Filing Dt:
|
11/13/1997
|
|
Title:
|
APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/17/1998
|
Application #:
|
08990123
|
Filing Dt:
|
12/12/1997
|
|
Title:
|
POST-LAPPING CLEANING PROCESS FOR SILICON WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/28/1999
|
Application #:
|
09000061
|
Filing Dt:
|
04/21/1998
|
|
Title:
|
METHOD AND APPARATUS FOR WASHING SILICON INGOT WITH WATER TO REMOVE PARTICULATE MATTER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/01/2000
|
Application #:
|
09002592
|
Filing Dt:
|
01/05/1998
|
|
Title:
|
CRYSTAL GROWING APPARATUS WITH MELT-DOPING FACILITY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/23/1999
|
Application #:
|
09003986
|
Filing Dt:
|
01/07/1998
|
|
Title:
|
SITU WAFER CLEANING PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/22/1999
|
Application #:
|
09017942
|
Filing Dt:
|
02/03/1998
|
|
Title:
|
CRUCIBLE AND METHOD OF PREPARATION THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/30/2001
|
Application #:
|
09030110
|
Filing Dt:
|
02/25/1998
|
|
Title:
|
IDEAL OXYGEN PRECIPITATING SILICON WAFERS AND OXYGEN OUT-DIFFUSION- LESS PROCESS THEREFOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/20/2001
|
Application #:
|
09057800
|
Filing Dt:
|
04/09/1998
|
|
Title:
|
LOW DEFECT DENSITY, IDEAL OXYGEN PRECIPITATING SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/03/2001
|
Application #:
|
09057801
|
Filing Dt:
|
04/09/1998
|
|
Title:
|
LOW DEFECT DENSITY SELF-INTERSTITIAL DOMINATED SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/06/1999
|
Application #:
|
09057851
|
Filing Dt:
|
04/09/1998
|
|
Title:
|
LOW DEFECT DENSITY VACANCY DOMINATED SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/11/2001
|
Application #:
|
09057907
|
Filing Dt:
|
04/09/1998
|
|
Title:
|
LOW DEFECT DENSITY SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/06/1999
|
Application #:
|
09072564
|
Filing Dt:
|
05/05/1998
|
|
Title:
|
INJECTOR FOR REACTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/19/2002
|
Application #:
|
09082906
|
Filing Dt:
|
05/21/1998
|
|
Title:
|
PROCESS FOR THE REMOVAL OF COPPER AND OTHER METALLIC IMPURITIES FROM SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/25/2000
|
Application #:
|
09092391
|
Filing Dt:
|
06/05/1998
|
|
Title:
|
ELECTRICAL RESISTANCE HEATER FOR CRYSTAL GROWING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/03/2001
|
Application #:
|
09093520
|
Filing Dt:
|
06/08/1998
|
|
Title:
|
COLLECTOR FOR AN AUTOMATED ON-LINE BATH ANALYSIS SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/06/2001
|
Application #:
|
09097779
|
Filing Dt:
|
06/15/1998
|
|
Title:
|
PROCESS AND APPRATUS FOR PREPARATION OF SILICON CRYSTALS WITH REDUCED METAL CONTENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/10/2000
|
Application #:
|
09107728
|
Filing Dt:
|
06/30/1998
|
|
Title:
|
SUSCEPTOR FOR BARREL REACTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/21/2000
|
Application #:
|
09167747
|
Filing Dt:
|
10/07/1998
|
|
Title:
|
CONTINUOUS OXIDATION PROCESS FOR CRYSTAL PULLING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/09/2001
|
Application #:
|
09172546
|
Filing Dt:
|
10/14/1998
|
|
Title:
|
METHOD AND SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/25/2000
|
Application #:
|
09234144
|
Filing Dt:
|
01/19/1999
|
|
Title:
|
HEAT SHIELD FOR CRYSTAL PULLER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/13/2001
|
Application #:
|
09245238
|
Filing Dt:
|
02/05/1999
|
|
Title:
|
TUNGSTEN DOPED CRUCIBLE AND METHOD FOR PREPARING SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2001
|
Application #:
|
09250908
|
Filing Dt:
|
02/16/1999
|
|
Title:
|
AN EPITAXIAL SILICON WAFER WITH INTRINSIC GETTERING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/06/2001
|
Application #:
|
09258478
|
Filing Dt:
|
02/26/1999
|
|
Title:
|
HEAT SHIELD ASSEMBLY FOR CRYSTAL PULLER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/10/2001
|
Application #:
|
09268968
|
Filing Dt:
|
03/16/1999
|
|
Title:
|
APPARATUS FOR CONTROLLING THE OXYGEN CONTENT IN SILICON WAFERS HEAVILY DOPED WITH ANTIMONY OR ARSENIC
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/30/2002
|
Application #:
|
09270366
|
Filing Dt:
|
03/16/1999
|
|
Title:
|
VACANCY DOMINATED, DEFECT-FREE SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2001
|
Application #:
|
09276278
|
Filing Dt:
|
03/25/1999
|
|
Title:
|
METHOD FOR PROCESSING A SEMICONDUCTOR WAFER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/05/2001
|
Application #:
|
09287916
|
Filing Dt:
|
04/07/1999
|
|
Title:
|
METHOD AND SYSTEM OF CONTROLLING TAPER GROWTH IN A SEMICONDUCTOR CRYSTAL GROWTH PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/06/2001
|
Application #:
|
09344036
|
Filing Dt:
|
06/25/1999
|
|
Publication #:
|
|
Pub Dt:
|
06/14/2001
| | | | |
|
Title:
|
PROCESS FOR PREPARING DEFECT FREE SILICON CRYSTALS WHICH ALLOWS FOR VARIABILITY IN PROCESS CONDITIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/11/2001
|
Application #:
|
09344709
|
Filing Dt:
|
06/25/1999
|
|
Publication #:
|
|
Pub Dt:
|
07/19/2001
| | | | |
|
Title:
|
PROCESS FOR GROWTH OF DEFECT FREE SILICON CRYSTALS OF ARBITRARILY LARGE DIAMETERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/15/2002
|
Application #:
|
09352980
|
Filing Dt:
|
07/14/1999
|
|
Title:
|
PROCESS FOR FABRICATING SEMICONDUCTOR WAFERS WITH EXTERNAL GETTERING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/05/2000
|
Application #:
|
09356616
|
Filing Dt:
|
07/19/1999
|
|
Title:
|
METHOD OF PROCESSING SEMICONDUCTOR WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/2004
|
Application #:
|
09366850
|
Filing Dt:
|
08/04/1999
|
|
Title:
|
NON-UNIFORM MINORITY CARRIER LIFETIME DISTRIBUTIONS IN HIGH PERFORMANCE SILICON POWER DEVICES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/08/2002
|
Application #:
|
09379383
|
Filing Dt:
|
08/23/1999
|
|
Title:
|
NON-OXYGEN PRECIPITATING CZOCHRALSKI SILICON WAFERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/20/2001
|
Application #:
|
09384669
|
Filing Dt:
|
08/27/1999
|
|
Title:
|
PROCESS FOR PREPARING AN IDEAL OXYGEN PRECIPITATING SILICON WAFER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/26/2002
|
Application #:
|
09385108
|
Filing Dt:
|
08/27/1999
|
|
Title:
|
THERMALLY ANNEALED WAFERS HAVING IMPROVED INTERNAL GETTERING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/22/2001
|
Application #:
|
09387288
|
Filing Dt:
|
08/31/1999
|
|
Title:
|
SILICON ON INSULATOR STRUCTURE FROM LOW DEFECT DENSITY SINGLE CRYSTAL SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/10/2001
|
Application #:
|
09404428
|
Filing Dt:
|
09/23/1999
|
|
Title:
|
METHOD OF PROCESSING SEMICONDUCTOR WAFERS TO BUILD IN BACK SURFACE DAMAGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/09/2002
|
Application #:
|
09416998
|
Filing Dt:
|
10/13/1999
|
|
Title:
|
THERMALLY ANNEALED, LOW DEFECT DENSITY SINGLE CRYSTAL SILICON
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2001
|
Application #:
|
09417610
|
Filing Dt:
|
10/13/1999
|
|
Title:
|
EPITAXIAL SILICON WAFERS SUBSTANTIALLY FREE OF GROWN - IN DEFECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/20/2001
|
Application #:
|
09421187
|
Filing Dt:
|
10/19/1999
|
|
Title:
|
METHOD OF CONTROLLING GROWTH OF A SEMICONDUCTOR CRYSTAL TO AUTOMATICALLY TRANSITION FROM TAPER GROWTH TO TARGET DIAMETER GROWTH
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/25/2001
|
Application #:
|
09432928
|
Filing Dt:
|
11/03/1999
|
|
Title:
|
METHOD OF DETERMINING PERFORMANCE CHARACTERISTICS OF POLISHING PADS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/28/2003
|
Application #:
|
09475320
|
Filing Dt:
|
12/30/1999
|
|
Publication #:
|
|
Pub Dt:
|
01/24/2002
| | | | |
|
Title:
|
METHOD FOR REVEALING AGGLOMERATED INTRINSIC POINT DEFECTS IN SEMICONDUCTOR CRYSTALS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/23/2002
|
Application #:
|
09481080
|
Filing Dt:
|
01/11/2000
|
|
Publication #:
|
|
Pub Dt:
|
01/10/2002
| | | | |
|
Title:
|
SEMICONDUCTOR WAFER MANUFACTURING PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/13/2001
|
Application #:
|
09489481
|
Filing Dt:
|
01/21/2000
|
|
Title:
|
Continuous oxidation process for crystal pulling Apparatus
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/17/2004
|
Application #:
|
09502340
|
Filing Dt:
|
02/10/2000
|
|
Title:
|
METHOD OF CONTROLLING DIAMETER OF A SILICON CRYSTAL IN A LOCKED SEED LIFT GROWTH PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/05/2002
|
Application #:
|
09503566
|
Filing Dt:
|
02/14/2000
|
|
Title:
|
Process for producing a silicon melt
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/12/2002
|
Application #:
|
09505269
|
Filing Dt:
|
02/16/2000
|
|
Title:
|
PROCESS FOR REDUCING SURFACE VARIATIONS FOR POLISHED WAFER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/23/2002
|
Application #:
|
09506105
|
Filing Dt:
|
02/17/2000
|
|
Title:
|
SEMICONDUCTOR WAFER MANUFACTURING PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/04/2003
|
Application #:
|
09507811
|
Filing Dt:
|
02/22/2000
|
|
Title:
|
METHOD FOR WAFER PROCESSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/20/2001
|
Application #:
|
09521288
|
Filing Dt:
|
03/08/2000
|
|
Title:
|
Barium doping of molten silicon for use in crystal growing process
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/26/2002
|
Application #:
|
09521525
|
Filing Dt:
|
03/08/2000
|
|
Title:
|
Strontium doping of molten silicon for use in crystal growing process
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/03/2002
|
Application #:
|
09566890
|
Filing Dt:
|
05/08/2000
|
|
Title:
|
MODIFIED SUSCEPTOR FOR USE IN CHEMICAL VAPOR DEPOSITION PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/01/2002
|
Application #:
|
09596493
|
Filing Dt:
|
06/19/2000
|
|
Title:
|
PROCESS FOR PREPARING SINGLE CRYSTAL SILICON HAVING UNIFORM THERMAL HISTORY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/15/2002
|
Application #:
|
09607389
|
Filing Dt:
|
06/30/2000
|
|
Title:
|
Method and apparatus for forming an epitaxial silicon wafer with a denuded zone
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/29/2003
|
Application #:
|
09607391
|
Filing Dt:
|
06/30/2000
|
|
Title:
|
METHOD AND APPARATUS FOR FORMING A SILICON WAFER WITH A DENUDED ZONE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/20/2002
|
Application #:
|
09608304
|
Filing Dt:
|
06/30/2000
|
|
Title:
|
NON-CONTAMINATING GAS-TIGHT VALVE FOR SEMICONDUCTOR APPLICATIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/24/2002
|
Application #:
|
09633958
|
Filing Dt:
|
08/08/2000
|
|
Title:
|
METHOD AND APPARATUS FOR A WAFER CARRIER HAVING AN INSERT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/21/2003
|
Application #:
|
09661821
|
Filing Dt:
|
09/14/2000
|
|
Title:
|
METHOD FOR PRODUCING CZOCHRALSKI SILICON FREE OF AGGLOMERATED SELF-INTERSTITIAL DEFECTS
|
|
