Patent Assignment Details
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| Reel/Frame: | 033206/0010 | |
| Pages: | 14 |
| | Recorded: | 06/28/2014 | | |
| Attorney Dkt #: | CIT-6519 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/04/2016
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Application #:
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14253541
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Filing Dt:
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04/15/2014
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Publication #:
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Pub Dt:
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11/20/2014
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Title:
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MULTI-STEP DEEP REACTIVE ION ETCHING FABRICATION PROCESS FOR SILICON-BASED TERAHERTZ COMPONENTS
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Assignee
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| 1200 EAST CALIFORNIA BOULEVARD |
| PASADENA, CALIFORNIA 91125 |
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Correspondence name and address
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MILSTEIN ZHANG & WU LLC
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2000 COMMONWEALTH AVENUE, SUITE 400
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NEWTON, MA 02466
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