Patent Assignment Details
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| Reel/Frame: | 033319/0001 | |
| Pages: | 5 |
| | Recorded: | 07/16/2014 | | |
| Attorney Dkt #: | 3326-1US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/11/2017
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Application #:
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14331704
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Filing Dt:
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07/15/2014
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Publication #:
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Pub Dt:
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01/21/2016
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Title:
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SYSTEMS AND METHODS FOR IMPROVING DEPOSITION RATE UNIFORMITY AND REDUCING DEFECTS IN SUBSTRATE PROCESSING SYSTEMS
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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HARNESS, DICKEY & PIERCE, P.L.C.
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P.O. BOX 828
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BLOOMFIELD HILLS, MI 48303
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