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Reel/Frame:033375/0200   Pages: 4
Recorded: 07/23/2014
Attorney Dkt #:2550/E72
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
10/06/2015
Application #:
14338754
Filing Dt:
07/23/2014
Publication #:
Pub Dt:
11/13/2014
Title:
METHOD OF ETCHING A WAFER
Assignors
1
Exec Dt:
06/20/2011
2
Exec Dt:
06/20/2011
Assignee
1
ONE TECHNOLOGY WAY
NORWOOD, MASSACHUSETTS 02062-9106
Correspondence name and address
ROBERT M. ASHER
SUNSTEIN KANN MURPHY & TIMBERS LLP
125 SUMMER STREET
BOSTON, MA 02110-1618

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