Patent Assignment Details
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| Reel/Frame: | 033922/0669 | |
| Pages: | 3 |
| | Recorded: | 10/09/2014 | | |
| Attorney Dkt #: | 1458-DE0712DIV |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/18/2014
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Application #:
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12718037
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Filing Dt:
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03/05/2010
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Publication #:
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Pub Dt:
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06/24/2010
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Title:
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METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL IN AN ETCH SYSTEM BY GAS FLOW CONTROL ON THE BASIS OF CD MEASUREMENTS
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Assignee
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| PO BOX 3453, ONE AMD PLACE |
| SUNNYVALE, CALIFORNIA 94088-3453 |
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Correspondence name and address
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DAVIDSON SHEEHAN LLP
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700 LAVACA ST.
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SUITE 1400-2323
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AUSTIN, TX 78701
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