Total properties:
16
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Patent #:
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Issue Dt:
|
11/20/2018
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Application #:
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12208992
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Filing Dt:
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09/11/2008
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Publication #:
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Pub Dt:
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03/19/2009
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Title:
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SUBSTRATE PROCESSING METHOD FOR DRYING A SUBSTRATE BY DISCHARGING GAS TO LIQUID LAYER ON THE SUBSTRATE WHILE ROTATING THE SUBSTRATE
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Patent #:
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Issue Dt:
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11/25/2014
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Application #:
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12209039
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Filing Dt:
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09/11/2008
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Publication #:
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Pub Dt:
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03/19/2009
| | | | |
Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12324788
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Filing Dt:
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11/26/2008
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Publication #:
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Pub Dt:
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06/04/2009
| | | | |
Title:
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MULTI-LINE SUBSTRATE TREATING APPARATUS
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Patent #:
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Issue Dt:
|
11/10/2015
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Application #:
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12324802
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Filing Dt:
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11/26/2008
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Publication #:
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Pub Dt:
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06/04/2009
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Title:
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MULTI-STORY SUBSTRATE TREATING APPARATUS WITH FLEXIBLE TRANSPORT MECHANISMS AND VERTICALLY DIVIDED TREATING UNITS
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Patent #:
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Issue Dt:
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03/29/2016
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Application #:
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12343292
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Filing Dt:
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12/23/2008
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Publication #:
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Pub Dt:
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07/02/2009
| | | | |
Title:
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SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES SIMULTANEOUSLY TREATING A PLURALITY OF SUBSTRATES
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Patent #:
|
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Issue Dt:
|
01/13/2015
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Application #:
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12628120
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Filing Dt:
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11/30/2009
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Publication #:
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|
Pub Dt:
|
03/25/2010
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
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12698862
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Filing Dt:
|
02/02/2010
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Publication #:
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|
Pub Dt:
|
06/03/2010
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
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12698876
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Filing Dt:
|
02/02/2010
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Publication #:
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|
Pub Dt:
|
05/27/2010
| | | | |
Title:
|
SUBSTRATE PROCESSING METHOD
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
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13036915
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Filing Dt:
|
02/28/2011
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Publication #:
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Pub Dt:
|
03/08/2012
| | | | |
Title:
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METHOD AND SYSTEM FOR THERMAL TREATMENT OF SUBSTRATES
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Patent #:
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NONE
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Issue Dt:
|
|
Application #:
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13284603
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Filing Dt:
|
10/28/2011
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Publication #:
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Pub Dt:
|
02/16/2012
| | | | |
Title:
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METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF A SUBSTRATE
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Patent #:
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|
Issue Dt:
|
02/17/2015
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Application #:
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13359388
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Filing Dt:
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01/26/2012
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Publication #:
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|
Pub Dt:
|
05/17/2012
| | | | |
Title:
|
DEVELOPING METHOD
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|
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Patent #:
|
|
Issue Dt:
|
01/05/2016
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Application #:
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13401617
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Filing Dt:
|
02/21/2012
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Publication #:
|
|
Pub Dt:
|
06/21/2012
| | | | |
Title:
|
SUBSTRATE TREATING APPARATUS
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|
|
Patent #:
|
|
Issue Dt:
|
11/03/2015
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Application #:
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13401625
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Filing Dt:
|
02/21/2012
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Publication #:
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|
Pub Dt:
|
06/14/2012
| | | | |
Title:
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SUBSTRATE TREATING APPARATUS USING HORIZONTAL TREATMENT CELL ARRANGEMENTS WITH PARALLEL TREATMENT LINES
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|
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Patent #:
|
|
Issue Dt:
|
10/20/2015
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Application #:
|
13401644
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Filing Dt:
|
02/21/2012
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Publication #:
|
|
Pub Dt:
|
06/14/2012
| | | | |
Title:
|
Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units
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|
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Patent #:
|
|
Issue Dt:
|
07/11/2017
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Application #:
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14149026
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Filing Dt:
|
01/07/2014
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Publication #:
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|
Pub Dt:
|
05/01/2014
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/14/2016
|
Application #:
|
14447409
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Filing Dt:
|
07/30/2014
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Publication #:
|
|
Pub Dt:
|
11/20/2014
| | | | |
Title:
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SUBSTRATE TREATING APPARATUS WITH SUBSTRATE REORDERING
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|