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Total properties:
59
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Patent #:
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Issue Dt:
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12/01/1998
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Application #:
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08662216
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Filing Dt:
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06/11/1996
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Title:
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COATING SOLUTION APPLYING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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07/14/1998
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Application #:
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08799478
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Filing Dt:
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02/12/1997
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Title:
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FILM DISSOLUTION METHOD OF DISSOLVING SILICA-BASED COATING FILM FORMED ON SURFACE OF A SUBSTRATE
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Patent #:
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Issue Dt:
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11/23/1999
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Application #:
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08953928
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Filing Dt:
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10/20/1997
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Title:
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COATING SOLUTION APPLYING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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08969273
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Filing Dt:
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11/13/1997
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Title:
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COATING SOLUTION APPLYING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
|
11/16/1999
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Application #:
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08997083
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Filing Dt:
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12/23/1997
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Title:
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DEVELOPING APPARATUS AND DEVELOPING METHOD
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Patent #:
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Issue Dt:
|
08/27/2002
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Application #:
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09450946
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Filing Dt:
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11/29/1999
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Title:
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COATING SOLUTION APPLYING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
|
06/22/2004
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Application #:
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10305911
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Filing Dt:
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11/26/2002
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Publication #:
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Pub Dt:
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10/02/2003
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Title:
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DEVELOPING APPARATUS AND DEVELOPING METHOD
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Patent #:
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Issue Dt:
|
11/11/2003
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Application #:
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10335302
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Filing Dt:
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12/31/2002
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Title:
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TREATING SOLUTION APPLYING METHOD
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Patent #:
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Issue Dt:
|
04/21/2009
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Application #:
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10926718
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Filing Dt:
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08/26/2004
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Publication #:
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Pub Dt:
|
03/17/2005
| | | | |
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Title:
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THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/08/2006
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Application #:
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10945652
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Filing Dt:
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09/21/2004
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Publication #:
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Pub Dt:
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03/24/2005
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Title:
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EDGE EXPOSING APPARATUS
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Patent #:
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Issue Dt:
|
08/14/2007
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Application #:
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11111154
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Filing Dt:
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04/20/2005
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Publication #:
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Pub Dt:
|
06/22/2006
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Title:
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COAT/DEVELOP MODULE WITH INDEPENDENT STATIONS
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Patent #:
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Issue Dt:
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05/13/2008
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Application #:
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11111156
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Filing Dt:
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04/20/2005
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Publication #:
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Pub Dt:
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06/22/2006
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Title:
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Patent #:
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Issue Dt:
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07/08/2008
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Application #:
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11111353
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Filing Dt:
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04/20/2005
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Publication #:
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Pub Dt:
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06/22/2006
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Title:
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COAT/DEVELOP MODULE WITH SHARED DISPENSE
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Patent #:
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Issue Dt:
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04/15/2008
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Application #:
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11112281
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Filing Dt:
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04/22/2005
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Publication #:
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Pub Dt:
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06/22/2006
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Title:
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CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
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Patent #:
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Issue Dt:
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09/25/2007
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Application #:
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11174681
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Filing Dt:
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07/05/2005
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Publication #:
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Pub Dt:
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10/26/2006
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Title:
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BAKE PLATE HAVING ENGAGEABLE THERMAL MASS
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Patent #:
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Issue Dt:
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11/20/2007
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Application #:
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11174781
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Filing Dt:
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07/05/2005
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Publication #:
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Pub Dt:
|
10/26/2006
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Title:
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INTEGRATED THERMAL UNIT HAVING A SHUTTLE WITH TWO-AXIS MOVEMENT
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Patent #:
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Issue Dt:
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10/30/2007
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Application #:
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11174782
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Filing Dt:
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07/05/2005
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Publication #:
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Pub Dt:
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10/26/2006
| | | | |
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Title:
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INTEGRATED THERMAL UNIT HAVING LATERALLY ADJACENT BAKE AND CHILL PLATES ON DIFFERENT PLANES
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Patent #:
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Issue Dt:
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10/16/2007
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Application #:
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11174988
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Filing Dt:
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07/05/2005
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Publication #:
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Pub Dt:
|
10/26/2006
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Title:
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INTEGRATED THERMAL UNIT HAVING A SHUTTLE WITH A TEMPERATURE CONTROLLED SURFACE
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Patent #:
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Issue Dt:
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06/01/2010
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Application #:
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11273439
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Filing Dt:
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11/10/2005
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Publication #:
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Pub Dt:
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05/18/2006
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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03/03/2009
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Application #:
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11273440
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Filing Dt:
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11/10/2005
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Publication #:
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Pub Dt:
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05/25/2006
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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10/18/2011
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Application #:
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11294727
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Filing Dt:
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12/06/2005
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Publication #:
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Pub Dt:
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07/13/2006
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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04/20/2010
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Application #:
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11344565
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Filing Dt:
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01/30/2006
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Publication #:
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Pub Dt:
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06/22/2006
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Title:
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CLUSTER TOOL SUBSTRATE THROUGHPUT OPTIMIZATION
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Patent #:
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Issue Dt:
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04/14/2009
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Application #:
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11380913
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Filing Dt:
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04/28/2006
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Publication #:
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Pub Dt:
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11/01/2007
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Title:
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METHOD AND SYSTEM TO MEASURE FLOW VELOCITY AND VOLUME
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Patent #:
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Issue Dt:
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10/20/2009
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Application #:
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11472780
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Filing Dt:
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06/22/2006
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Publication #:
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Pub Dt:
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12/28/2006
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/03/2010
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11475598
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Filing Dt:
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06/27/2006
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Publication #:
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Pub Dt:
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01/04/2007
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Title:
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SUBSTRATE DRYING APPARATUS, SUBSTRATE CLEANING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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05/25/2010
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11621216
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01/09/2007
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Publication #:
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Pub Dt:
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07/19/2007
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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04/06/2010
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Application #:
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11623231
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Filing Dt:
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01/15/2007
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Publication #:
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Pub Dt:
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07/26/2007
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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12/02/2008
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11689384
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03/21/2007
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Publication #:
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Pub Dt:
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04/24/2008
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Title:
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METHODS AND SYSTEMS FOR PERFORMING REAL-TIME WIRELESS TEMPERATURE MEASUREMENT FOR SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
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05/03/2011
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11691468
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Filing Dt:
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03/26/2007
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Pub Dt:
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02/14/2008
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Title:
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METHOD AND APPARATUS FOR MONITORING AND CONTROL OF SUCK BACK LEVEL IN A PHOTORESIST DISPENSE SYSTEM
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Patent #:
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Issue Dt:
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05/19/2009
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11834518
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Filing Dt:
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08/06/2007
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Publication #:
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Pub Dt:
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02/07/2008
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Title:
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METHODS AND SYSTEMS FOR CONTROLLING CRITICAL DIMENSIONS IN TRACK LITHOGRAPHY TOOLS
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11/09/2010
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11849978
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09/04/2007
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Publication #:
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Pub Dt:
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03/05/2009
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Title:
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METHOD AND SYSTEM FOR CONTROLLING BAKE PLATE TEMPERATURE IN A SEMICONDUCTOR PROCESSING CHAMBER
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10/13/2009
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11868453
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10/05/2007
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Pub Dt:
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01/31/2008
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Title:
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INTEGRATED THERMAL UNIT HAVING A SHUTTLE WITH A TEMPERATURE CONTROLLED SURFACE
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06/22/2010
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11929650
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10/30/2007
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02/28/2008
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Title:
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INTEGRATED THERMAL UNIT HAVING A SHUTTLE WITH TWO-AXIS MOVEMENT
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03/29/2011
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11930963
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10/31/2007
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11/13/2008
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Title:
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10/04/2011
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12031667
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02/14/2008
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Pub Dt:
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08/21/2008
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Title:
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SUBSTRATE PROCESSING APPARATUS WITH INTEGRATED CLEANING UNIT
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01/05/2010
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12031677
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02/14/2008
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08/21/2008
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Title:
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03/20/2012
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12032582
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02/15/2008
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Pub Dt:
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08/28/2008
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Title:
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SUBSTRATE DEVELOPING METHOD AND DEVELOPING APPARATUS
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02/26/2013
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12045986
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03/11/2008
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03/05/2009
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Title:
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SUBSTRATE TRANSPORT APPARATUS AND HEAT TREATMENT APPARATUS
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01/05/2010
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12179522
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07/24/2008
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Pub Dt:
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01/29/2009
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Title:
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BEVEL INSPECTION APPARATUS FOR SUBSTRATE PROCESSING
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10/16/2012
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12179559
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07/24/2008
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Pub Dt:
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01/29/2009
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Title:
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SUBSTRATE CLEANING DEVICE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
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07/10/2012
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12208925
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09/11/2008
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Publication #:
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Pub Dt:
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03/19/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS WITH MULTI-SPEED DRYING HAVING RINSE LIQUID SUPPLIER THAT MOVES FROM CENTER OF ROTATED SUBSTRATE TO ITS PERIPHERY AND STOPS TEMPORARILY SO THAT A DRYING CORE CAN FORM
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10/16/2012
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12242296
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09/30/2008
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10/29/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS
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02/28/2012
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12267267
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11/07/2008
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05/14/2009
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Title:
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05/01/2012
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11/07/2008
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05/14/2009
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Title:
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10/01/2013
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12324794
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11/26/2008
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06/04/2009
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Title:
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03/06/2012
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12/12/2008
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06/17/2010
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MULTI-CHANNEL DEVELOPER SYSTEM
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09/13/2011
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01/06/2009
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07/09/2009
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11/19/2013
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02/02/2010
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06/03/2010
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06/11/2013
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02/02/2010
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05/27/2010
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10/11/2011
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03/08/2010
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06/24/2010
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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01/21/2014
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03/17/2010
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09/23/2010
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SUBSTRATE PROCESSING APPARATUS
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07/30/2013
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04/06/2010
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Pub Dt:
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07/29/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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09/24/2013
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12813251
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06/10/2010
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09/23/2010
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Title:
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SUBSTRATE PROCESSING METHOD
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07/22/2014
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12823802
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06/25/2010
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01/06/2011
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07/02/2013
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12870402
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08/27/2010
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Pub Dt:
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03/17/2011
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND INSPECTION/PERIPHERY EXPOSURE APPARATUS
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Issue Dt:
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11/12/2013
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Application #:
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12898856
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Filing Dt:
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10/06/2010
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Publication #:
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Pub Dt:
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06/09/2011
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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01/28/2014
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Application #:
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13019711
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Filing Dt:
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02/02/2011
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Publication #:
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Pub Dt:
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09/29/2011
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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07/15/2014
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Application #:
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13239517
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Filing Dt:
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09/22/2011
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Publication #:
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Pub Dt:
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08/23/2012
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Title:
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APPARATUS FOR AND METHOD OF HEAT-TREATING FILM FORMED ON SURFACE OF SUBSTRATE
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Patent #:
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Issue Dt:
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04/29/2014
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Application #:
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14011993
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Filing Dt:
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08/28/2013
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Publication #:
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Pub Dt:
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01/02/2014
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Title:
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SUBSTRATE TREATING APPARATUS WITH INTER-UNIT BUFFERS
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