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Patent #:
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Issue Dt:
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03/13/2001
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Application #:
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09325838
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Filing Dt:
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06/04/1999
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Title:
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CHEMICAL DELIVERY SYSTEM HAVING PURGE SYSTEM UTILIZING MULTIPLE PURGE TECHNIQUES
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Patent #:
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Issue Dt:
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04/11/2000
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Application #:
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09327842
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Filing Dt:
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06/08/1999
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Title:
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DELIVERY SYSTEM AND MANIFOLD
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09327843
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Filing Dt:
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06/08/1999
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Title:
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BULK CHEMICAL DELIVERY SYSTEM
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Patent #:
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Issue Dt:
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10/16/2001
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Application #:
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09356020
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Filing Dt:
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07/16/1999
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Title:
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AUTO-SWITCHING GAS DELIVERY SYSTEM UTILIZING SUB-ATMOSPHERIC PRESSURE GAS SUPPLY VESSELS
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09359985
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Filing Dt:
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07/23/1999
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Title:
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BULK CHEMICAL DELIVERY SYSTEM
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Patent #:
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Issue Dt:
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06/15/2004
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Application #:
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09430918
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Filing Dt:
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11/01/1999
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Title:
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STERILISABLE CONTAINER WITH A STERILISABLE ADAPTER FOR DOCKING TO A PORT OF AN ISOLATION SYSTEM
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Patent #:
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Issue Dt:
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01/28/2003
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Application #:
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09441694
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Filing Dt:
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11/16/1999
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Title:
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MOCVD OF SBT USING TETRAHYDROFURAN BASED SOLVENT SYSTEM FOR PRECURSOR DELIVERY
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Patent #:
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Issue Dt:
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07/31/2001
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Application #:
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09461693
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Filing Dt:
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12/14/1999
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Title:
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INTEGRATED CIRCUIT DEVICES AND METHODS EMPLOYING AMORPHOUS SILICON CARBIDE RESISTOR MATERIALS
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Patent #:
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Issue Dt:
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08/20/2002
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Application #:
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09462690
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Filing Dt:
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09/01/2000
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PCT #:
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US9814373
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Title:
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BULK CHEMICAL DELIVERY SYSTEM
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Patent #:
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Issue Dt:
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06/12/2001
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Application #:
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09463124
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Filing Dt:
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04/06/2000
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Title:
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LIQUID DELIVERY SYSTEM COMPRISING UPSTREAM PRESSURE CONTROL MEANS
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09469700
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Filing Dt:
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12/22/1999
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Title:
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LOW TEMPERATURE PROCESS FOR HIGH DENSITY THIN FILM INTEGRATED CAPACITORS AND AMORPHOUSLY FRUSTRATED FERROELECTRIC MATERIALS THEREFOR
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Patent #:
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Issue Dt:
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02/27/2001
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Application #:
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09475387
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Filing Dt:
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12/30/1999
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Title:
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CHEMICAL DELIVERY AND CONTAINMENT SYSTEM EMPLOYING MOBILE SHIPPING CRATE
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Patent #:
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Issue Dt:
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05/08/2001
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Application #:
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09476080
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Filing Dt:
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12/30/1999
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Title:
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MULTI-COMPONENT MIXTURES FOR MANUFACTURE OF SEMI-CONDUCTORS
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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09532268
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Filing Dt:
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03/22/2000
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Title:
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Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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09551018
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Filing Dt:
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04/18/2000
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Title:
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SILICON REAGENTS AND LOW TEMPERATURE CVD METHOD OF FORMING SILICON-CONTAINING GATE DIELECTRIC MATERIALS USING SAME
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Patent #:
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Issue Dt:
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02/05/2002
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Application #:
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09552347
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Filing Dt:
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04/19/2000
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Title:
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Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein
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Patent #:
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Issue Dt:
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01/20/2004
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Application #:
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09557165
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Filing Dt:
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04/25/2000
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Title:
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AMORPHOUS SILICON CARBIDE THIN FILM COATING
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Patent #:
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Issue Dt:
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06/18/2002
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09564323
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Filing Dt:
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05/03/2000
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Title:
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GAS CABINET ASSEMBLY COMPRISING SORBENT-BASED GAS STORAGE AND DELIVERY SYSTEM
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Patent #:
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Issue Dt:
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11/20/2001
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09603597
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06/26/2000
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Title:
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Stable hydride source compositions for manufacture of semiconductor devices and structures
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09624478
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Filing Dt:
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07/24/2000
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Title:
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FLUID DISTRIBUTION SYSTEM AND PROCESS, AND SEMICONDUCTOR FABRICATION FACILITY UTILIZING SAME
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09635880
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Filing Dt:
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08/10/2000
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Title:
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FLUID STORAGE AND DISPENSING SYSTEM
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Patent #:
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01/29/2008
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Application #:
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09649549
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Filing Dt:
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08/28/2000
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Title:
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SOURCE REAGENT COMPOSITIONS AND METHOD FOR FORMING METAL FILMS ON A SUBSTRATE BY CHEMICAL VAPOR DEPOSITION
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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09681609
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Filing Dt:
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05/08/2001
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Publication #:
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Pub Dt:
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11/14/2002
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Title:
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BARRIER STRUCTURES FOR INTEGRATION OF HIGH K OXIDES WITH CU AND AI ELECTRODES
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09695361
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Filing Dt:
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10/24/2000
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Title:
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Method for sub-atmospheric gas delivery with backflow control
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Patent #:
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Issue Dt:
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09/16/2003
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09708243
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Filing Dt:
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11/08/2000
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Title:
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NON-PLASMA IN-SITU CLEANING OF PROCESSING CHAMBERS USING STATIC FLOW METHODS
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09711450
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Filing Dt:
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11/13/2000
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Title:
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Chemical delivery system having purge system utilizing multiple purge techniques
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10/02/2001
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09711813
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11/13/2000
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Title:
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Chemical delivery system having purge system utilizing multiple purge techniques
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07/29/2003
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09726183
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11/29/2000
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08/01/2002
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ZIRCONIUM-DOPED BST MATERIALS AND MOCVD PROCESS FORMING SAME
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04/30/2002
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09727023
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11/29/2000
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04/05/2001
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Fabrication of electron emitters coated with material such as carbon
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09/03/2002
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09774262
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01/30/2001
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06/21/2001
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Title:
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METHOD FOR LIQUID DELIVERY CVD UTILIZING ALKANE AND POLYAMINE SOLVENT COMPOSITIONS
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12/17/2002
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09783919
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02/15/2001
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09/26/2002
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FLUID STORAGE AND DISPENSING SYSTEM FEATURING EX SITU STRAIN GAUGE PRESSURE MONITORING ASSEMBLY
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09/23/2003
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09793023
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02/26/2001
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09/19/2002
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Title:
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SOURCE REAGENT COMPOSITION FOR CVD FORMATION OF ZR/HF DOPED GATE DIELECTRIC AND HIGH DIELECTRIC CONSTANT METAL OXIDE THIN FILMS AND METHOD OF USING SAME
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04/08/2003
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09800539
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03/07/2001
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09/12/2002
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DOUBLE CHAMBER ION IMPLANTATION SYSTEM
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12/30/2003
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09800643
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03/07/2001
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09/19/2002
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THERMAL REGULATION OF AN ION IMPLANTATION SYSTEM
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05/04/2004
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09873138
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06/01/2001
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11/15/2001
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Title:
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LOW TEMPERATURE CHEMICAL VAPOR DEPOSITION PROCESS FOR FORMING BISMUTH-CONTAINING CERAMIC THIN FILMS USEFUL IN FERROELECTRIC MEMORY DEVICES
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05/13/2003
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06/05/2001
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01/24/2002
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FLUID DISTRIBUTION SYSTEM AND PROCESS, AND SEMICONDUCTOR FABRICATION FACILITY UTILIZING SAME
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04/12/2005
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09880472
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06/13/2001
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12/19/2002
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05/06/2003
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09906161
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07/16/2001
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04/04/2002
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REFILLABLE AMPULE AND METHOD RE SAME
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08/22/2006
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09907282
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07/17/2001
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02/07/2002
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10/29/2002
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09924866
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08/08/2001
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01/10/2006
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09928860
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08/13/2001
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02/07/2002
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SCALABLE LEAD ZIRCONIUM TITANATE (PZT) THIN FILM MATERIAL AND DEPOSITION METHOD, AND FERROELECTRIC MEMORY DEVICE STRUCTURES COMPRISING SUCH THIN FILM MATERIAL
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10/01/2002
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09949340
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09/07/2001
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06/13/2002
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CHEMICAL DELIVERY SYSTEM HAVING PURGE SYSTEM UTILIZING MULTIPLE PURGE TECHNIQUES
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03/22/2005
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09/18/2001
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12/12/2002
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11/11/2003
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11/01/2001
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07/04/2002
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04/01/2003
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12/05/2001
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06/27/2002
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12/09/2003
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12/07/2001
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06/06/2002
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09/19/2006
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12/13/2001
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06/26/2003
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11/05/2002
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11/12/2001
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05/02/2002
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07/15/2003
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11/12/2001
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06/12/2003
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07/20/2004
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01/11/2005
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04/15/2004
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03/13/2007
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06/29/2010
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09/09/2003
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05/08/2002
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12/09/2003
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02/20/2003
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02/22/2005
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12/11/2003
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07/26/2005
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10/28/2003
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12/19/2002
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07/27/2004
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02/12/2004
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04/06/2004
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08/03/2004
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05/06/2004
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05/12/2009
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05/20/2004
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11/25/2008
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05/27/2004
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08/30/2005
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12/09/2002
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06/10/2004
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01/31/2006
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12/09/2002
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06/24/2004
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06/01/2004
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10315635
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12/10/2002
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06/10/2004
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01/24/2006
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10345616
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01/16/2003
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07/22/2004
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Title:
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CHEMICAL VAPOR DEPOSITION PRECURSORS FOR DEPOSITION OF TANTALUM-BASED MATERIALS
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03/22/2005
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02/19/2003
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08/19/2004
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08/15/2006
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06/24/2003
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04/19/2005
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06/26/2003
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12/30/2004
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03/14/2006
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10623244
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07/18/2003
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01/29/2004
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06/21/2005
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10625179
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07/23/2003
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01/27/2005
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06/21/2005
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08/14/2003
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10/14/2004
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04/24/2007
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08/18/2003
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02/24/2005
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09/09/2008
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08/28/2003
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02/26/2004
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10/18/2005
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09/09/2003
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03/10/2005
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10/31/2006
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09/23/2003
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03/25/2004
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09/12/2006
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09/26/2003
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02/24/2005
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08/25/2009
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04/14/2005
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11/01/2005
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04/14/2005
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11/04/2008
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10/31/2003
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07/15/2004
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COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS
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08/07/2007
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11/03/2003
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05/05/2005
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06/17/2004
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11/23/2004
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06/24/2004
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04/20/2010
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09/02/2004
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09/30/2004
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09/23/2004
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08/11/2005
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11/20/2007
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08/26/2004
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08/25/2005
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02/28/2006
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10/21/2004
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01/13/2005
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10/13/2009
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04/14/2005
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04/27/2006
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04/27/2006
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09/15/2005
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10/13/2005
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