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Patent #:
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Issue Dt:
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02/16/2010
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Application #:
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11074408
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Filing Dt:
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03/08/2005
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Publication #:
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Pub Dt:
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08/11/2005
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Title:
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LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE
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Patent #:
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Issue Dt:
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02/24/2009
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Application #:
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11103224
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Filing Dt:
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04/11/2005
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Publication #:
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Pub Dt:
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09/01/2005
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Title:
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GAS STORAGE AND DISPENSING SYSTEM WITH MONOLITHIC CARBON ADSORBENT
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Patent #:
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Issue Dt:
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10/14/2008
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Application #:
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11157733
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Filing Dt:
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06/21/2005
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Publication #:
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Pub Dt:
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12/01/2005
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Title:
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DELIVERY SYSTEMS FOR EFFICIENT VAPORIZATION OF PRECURSOR SOURCE MATERIAL
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Patent #:
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Issue Dt:
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06/06/2006
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Application #:
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11157760
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Filing Dt:
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06/21/2005
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Publication #:
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Pub Dt:
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11/03/2005
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Title:
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PHOTOMETRICALLY MODULATED DELIVERY OF REAGENTS
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Patent #:
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Issue Dt:
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05/13/2008
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Application #:
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11214165
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Filing Dt:
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08/29/2005
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Publication #:
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Pub Dt:
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04/06/2006
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Title:
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PERMEABLE GAS ASSEMBLY FOR GAS DELIVERY
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Patent #:
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Issue Dt:
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11/25/2008
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Application #:
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11220166
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Filing Dt:
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09/06/2005
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Publication #:
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Pub Dt:
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01/19/2006
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Title:
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GAS STORAGE AND DISPENSING SYSTEM WITH MONOLITHIC CARBON ADSORBENT
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Patent #:
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Issue Dt:
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04/03/2007
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Application #:
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11224588
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Filing Dt:
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09/12/2005
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Publication #:
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Pub Dt:
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01/19/2006
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Title:
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TANTALUM AMIDE COMPLEXES FOR DEPOSITING TANTALUM-CONTAINING FILMS, AND METHOD OF MAKING SAME
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Patent #:
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Issue Dt:
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03/10/2009
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Application #:
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11227944
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Filing Dt:
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09/15/2005
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Publication #:
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Pub Dt:
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03/16/2006
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Title:
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RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL
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Patent #:
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Issue Dt:
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09/12/2006
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Application #:
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11253143
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Filing Dt:
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10/18/2005
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Publication #:
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Pub Dt:
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02/16/2006
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Title:
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AUTO-SWITCHING SYSTEM FOR SWITCH-OVER OF GAS STORAGE AND DISPENSING VESSELS IN A MULTI-VESSEL ARRAY
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Patent #:
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Issue Dt:
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10/23/2007
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Application #:
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11311199
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Filing Dt:
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12/19/2005
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Publication #:
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Pub Dt:
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05/04/2006
| | | | |
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Title:
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GAS STORAGE AND DISPENSING SYSTEM FOR VARIABLE CONDUCTANCE DISPENSING OF GAS AT CONSTANT FLOW RATE
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Patent #:
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Issue Dt:
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03/18/2008
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Application #:
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11328582
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Filing Dt:
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01/10/2006
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Publication #:
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Pub Dt:
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06/01/2006
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Title:
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SCALABLE LEAD ZIRCONIUM TITANATE (PZT) THIN FILM MATERIAL AND DEPOSITION METHOD, AND FERROELECTRIC MEMORY DEVICE STRUCTURES COMPRISING SUCH THIN FILM MATERIAL
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Patent #:
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Issue Dt:
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02/12/2008
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Application #:
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11336585
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Filing Dt:
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01/20/2006
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Publication #:
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Pub Dt:
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06/22/2006
| | | | |
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Title:
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CHEMICAL VAPOR DEPOSITION PRECURSORS FOR DEPOSITION OF TANTALUM-BASED MATERIALS
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Patent #:
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Issue Dt:
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11/10/2009
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Application #:
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11360732
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Filing Dt:
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02/23/2006
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Publication #:
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Pub Dt:
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08/10/2006
| | | | |
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Title:
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PRESSURE-BASED GAS DELIVERY SYSTEM AND METHOD FOR REDUCING RISKS ASSOCIATED WITH STORAGE AND DELIVERY OF HIGH PRESSURE GASES
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Patent #:
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Issue Dt:
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02/02/2010
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11440241
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Filing Dt:
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05/24/2006
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Publication #:
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Pub Dt:
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10/05/2006
| | | | |
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Title:
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FEEDBACK CONTROL SYSTEM AND METHOD FOR MAINTAINING CONSTANT RESISTANCE OPERATION OF ELECTRICALLY HEATED ELEMENTS
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Patent #:
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Issue Dt:
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08/05/2008
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11443380
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Filing Dt:
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05/30/2006
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Publication #:
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Pub Dt:
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11/30/2006
| | | | |
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Title:
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GAS DELIVERY SYSTEM WITH INTEGRATED VALVE MANIFOLD FUNCTIONALITY FOR SUB-ATMOSPHERIC AND SUPER-ATMOSPHERIC PRESSURE APPLICATIONS
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Patent #:
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Issue Dt:
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05/13/2008
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Application #:
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11445755
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Filing Dt:
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06/02/2006
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Publication #:
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Pub Dt:
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09/28/2006
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Title:
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PHOTOMETRICALLY MODULATED DELIVERY OF REAGENTS
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Patent #:
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Issue Dt:
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02/05/2008
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Application #:
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11453700
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Filing Dt:
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06/15/2006
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Publication #:
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Pub Dt:
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10/26/2006
| | | | |
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Title:
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IN-SITU GAS BLENDING AND DILUTION SYSTEM FOR DELIVERY OF DILUTE GAS AT A PREDETERMINED CONCENTRATION
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Patent #:
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Issue Dt:
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02/03/2009
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Application #:
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11519681
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Filing Dt:
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09/12/2006
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Publication #:
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Pub Dt:
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03/22/2007
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Title:
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SEMICONDUCTOR MANUFACTURING FACILITY UTILIZING EXHAUST RECIRCULATION
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Patent #:
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Issue Dt:
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04/01/2008
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Application #:
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11555094
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Filing Dt:
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10/31/2006
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Publication #:
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Pub Dt:
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08/30/2007
| | | | |
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Title:
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MONITORING SYSTEM COMPRISING INFRARED THERMOPILE DETECTOR
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11577852
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Filing Dt:
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03/13/2008
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Publication #:
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Pub Dt:
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04/16/2009
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PCT #:
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US0538102
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Title:
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NOVEL METHODS FOR CLEANING ION IMPLANTER COMPONENTS
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Patent #:
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Issue Dt:
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06/28/2011
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11577864
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Filing Dt:
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10/04/2007
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Publication #:
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Pub Dt:
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11/13/2008
| | |
PCT #:
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US0538173
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Title:
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FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITORING OF FLUID STORAGE AND DISPENSING VESSEL
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Patent #:
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Issue Dt:
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05/13/2008
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11625918
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Filing Dt:
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01/23/2007
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Publication #:
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Pub Dt:
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05/24/2007
| | | | |
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Title:
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TANTALUM AMIDE COMPLEXES FOR DEPOSITING TANTALUM-CONTAINING FILMS, AND METHOD OF MAKING SAME
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Patent #:
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Issue Dt:
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10/11/2011
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Application #:
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11750134
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Filing Dt:
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05/17/2007
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Publication #:
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Pub Dt:
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09/20/2007
| | | | |
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Title:
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CHEMICAL VAPOR DEPOSITION OF HIGH CONDUCTIVITY, ADHERENT THIN FILMS OF RUTHENIUM
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Patent #:
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Issue Dt:
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08/23/2011
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Application #:
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11772157
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Filing Dt:
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06/30/2007
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Publication #:
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Pub Dt:
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12/13/2007
| | | | |
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Title:
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FLUID STORAGE AND DISPENSING VESSELS HAVING COLORIMETRICALLY VERIFIABLE LEAK-TIGHTNESS, AND METHOD OF MAKING SAME
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Patent #:
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Issue Dt:
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07/07/2009
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11846394
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Filing Dt:
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08/28/2007
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Publication #:
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Pub Dt:
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02/21/2008
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Title:
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METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
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Patent #:
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Issue Dt:
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05/31/2011
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Application #:
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11913553
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Filing Dt:
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02/01/2008
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Publication #:
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Pub Dt:
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08/26/2010
| | |
PCT #:
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US0617149
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Title:
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FLUID STORAGE AND DISPENSING SYSTEMS, AND FLUID SUPPLY PROCESSES COMPRISING SAME
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11924716
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Filing Dt:
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10/26/2007
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Publication #:
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Pub Dt:
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02/28/2008
| | | | |
|
Title:
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SCALABLE LEAD ZIRCONIUM TITANATE (PZT) THIN FILM MATERIAL AND DEPOSITION METHOD, AND FERROELECTRIC MEMORY DEVICE STRUCTURES COMPRISING SUCH THIN FILM MATERIAL
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Patent #:
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Issue Dt:
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11/08/2011
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Application #:
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11925838
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Filing Dt:
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10/27/2007
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Title:
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SUPER-DRY REAGENT COMPOSITIONS FOR FORMATION OF ULTRA LOW K FILMS
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Patent #:
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Issue Dt:
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02/10/2009
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11930031
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Filing Dt:
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10/30/2007
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Publication #:
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Pub Dt:
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03/06/2008
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Title:
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METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
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Patent #:
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Issue Dt:
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10/30/2012
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Application #:
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11949871
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Filing Dt:
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12/04/2007
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Publication #:
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Pub Dt:
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07/14/2011
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Title:
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SOURCE REAGENT COMPOSITIONS AND METHOD FOR FORMING METAL FILMS ON A SUBSTRATE BY CHEMICAL VAPOR DEPOSITION
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11993795
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Filing Dt:
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04/29/2010
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Publication #:
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|
Pub Dt:
|
09/09/2010
| | |
PCT #:
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US0624308
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Title:
|
APPARATUS AND PROCESS FOR INTEGRATED GAS BLENDING
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Patent #:
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Issue Dt:
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07/06/2010
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Application #:
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12013433
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Filing Dt:
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01/12/2008
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Publication #:
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Pub Dt:
|
02/05/2009
| | | | |
|
Title:
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TANTALUM AMIDO-COMPLEXES WITH CHELATE LIGANDS USEFUL FOR CVD AND ALD OF TAN AND TA205 THIN FILMS
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Patent #:
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|
Issue Dt:
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01/04/2011
|
Application #:
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12019557
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Filing Dt:
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01/24/2008
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|
Publication #:
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|
Pub Dt:
|
07/03/2008
| | | | |
|
Title:
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MONOSILANE OR DISILANE DERIVATIVES AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS USING THE SAME
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Patent #:
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Issue Dt:
|
06/21/2011
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Application #:
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12058751
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Filing Dt:
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03/30/2008
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|
Publication #:
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|
Pub Dt:
|
10/02/2008
| | | | |
|
Title:
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COPPER PRECURSORS FOR CVD/ALD/DIGITAL CVD OF COPPER METAL FILMS
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|
Patent #:
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NONE
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Issue Dt:
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|
Application #:
|
12065471
|
Filing Dt:
|
04/14/2008
|
|
Publication #:
|
|
Pub Dt:
|
09/11/2008
| | |
PCT #:
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US0634135
|
|
Title:
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Delivery of Low Pressure Dopant Gas to a High Voltage Ion Source
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|
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|
Patent #:
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|
Issue Dt:
|
05/17/2011
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Application #:
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12065503
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Filing Dt:
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06/14/2008
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|
Publication #:
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|
Pub Dt:
|
10/09/2008
| | |
PCT #:
|
US0633899
|
|
Title:
|
BORON ION IMPLANTATION USING ALTERNATIVE FLUORINATED BORON PRECURSORS, AND FORMATION OF LARGE BORON HYDRIDES FOR IMPLANATION
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|
Patent #:
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NONE
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Issue Dt:
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|
Application #:
|
12088825
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Filing Dt:
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03/31/2008
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|
Publication #:
|
|
Pub Dt:
|
10/16/2008
| | |
PCT #:
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US0638358
|
|
Title:
|
Systems and Methods for Determination of Endpoint of Chamber Cleaning Processes
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Patent #:
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Issue Dt:
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05/04/2010
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Application #:
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12120101
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Filing Dt:
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05/13/2008
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|
Publication #:
|
|
Pub Dt:
|
09/04/2008
| | | | |
|
Title:
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PHOTOMETRICALLY MODULATED DELIVERY OF REAGENTS
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|
|
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Patent #:
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|
Issue Dt:
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01/04/2011
|
Application #:
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12182880
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Filing Dt:
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07/30/2008
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|
Publication #:
|
|
Pub Dt:
|
12/11/2008
| | | | |
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Title:
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NANOPOROUS ARTICLES AND METHODS OF MAKING SAME
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Patent #:
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|
Issue Dt:
|
04/13/2010
|
Application #:
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12186490
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Filing Dt:
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08/05/2008
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|
Publication #:
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|
Pub Dt:
|
11/27/2008
| | | | |
|
Title:
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GAS DELIVERY SYSTEM WITH INTEGRATED VALVE MANIFOLD FUNCTIONALITY FOR SUB-ATMOSPHERIC AND SUPER-ATMOSPHERIC PRESSURE APPLICATIONS
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Patent #:
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Issue Dt:
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05/11/2010
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Application #:
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12247120
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Filing Dt:
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10/07/2008
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Publication #:
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|
Pub Dt:
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04/02/2009
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Title:
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COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS
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Patent #:
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Issue Dt:
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01/10/2012
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Application #:
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12263403
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Filing Dt:
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10/31/2008
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Publication #:
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|
Pub Dt:
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04/30/2009
| | | | |
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Title:
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AMORPHOUS GE/TE DEPOSITION PROCESS
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Patent #:
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Issue Dt:
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12/29/2009
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Application #:
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12282511
|
Filing Dt:
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10/08/2008
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|
Publication #:
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|
Pub Dt:
|
03/19/2009
| | |
PCT #:
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US0763825
|
|
Title:
|
PRECURSOR COMPOSITIONS FOR ATOMIC LAYER DEPOSITION AND CHEMICAL VAPOR DEPOSITION OF TITANATE, LANTHANATE, AND TANTALATE DIELECTRIC FILMS
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Patent #:
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Issue Dt:
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12/10/2013
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Application #:
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12298727
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Filing Dt:
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01/19/2010
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|
Publication #:
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|
Pub Dt:
|
06/24/2010
| | |
PCT #:
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US0767542
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|
Title:
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CLEANING OF SEMICONDUCTOR PROCESSING SYSTEMS
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|
Patent #:
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Issue Dt:
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10/16/2012
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Application #:
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12300459
|
Filing Dt:
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12/22/2008
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|
Publication #:
|
|
Pub Dt:
|
05/14/2009
| | |
PCT #:
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US0763832
|
|
Title:
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LOW TEMPERATURE DEPOSITION OF PHASE CHANGE MEMORY MATERIALS
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|
|
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|
Patent #:
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|
Issue Dt:
|
11/23/2010
|
Application #:
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12307101
|
Filing Dt:
|
02/20/2009
|
|
Publication #:
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|
Pub Dt:
|
12/10/2009
| | |
PCT #:
|
US0763830
|
|
Title:
|
ANTIMONY AND GERMANIUM COMPLEXES USEFUL FOR CVD/ALD OF METAL THIN FILMS
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|
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|
Patent #:
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|
Issue Dt:
|
05/12/2015
|
Application #:
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12307957
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Filing Dt:
|
04/07/2009
|
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Publication #:
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Pub Dt:
|
01/07/2010
| | |
PCT #:
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US0773107
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|
Title:
|
SYSTEMS AND METHODS FOR MANAGING MATERIAL STORAGE VESSELS HAVING INFORMATION STORAGE ELEMENTS
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Patent #:
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Issue Dt:
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11/09/2010
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Application #:
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12358723
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Filing Dt:
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01/23/2009
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Publication #:
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|
Pub Dt:
|
05/28/2009
| | | | |
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Title:
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METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
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Patent #:
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|
Issue Dt:
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12/28/2010
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Application #:
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12364800
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Filing Dt:
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02/03/2009
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Publication #:
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|
Pub Dt:
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11/05/2009
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Title:
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SEMICONDUCTOR MANUFACTURING FACILITY UTILIZING EXHAUST RECIRCULATION
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Patent #:
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Issue Dt:
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08/23/2011
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Application #:
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12392077
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Filing Dt:
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02/24/2009
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Publication #:
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Pub Dt:
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07/30/2009
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Title:
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GAS STORAGE AND DISPENSING SYSTEM WITH MONOLITHIC CARBON ADSORBENT
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Patent #:
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|
|
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13264745
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Filing Dt:
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01/26/2012
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Publication #:
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Pub Dt:
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05/24/2012
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PCT #:
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US1031125
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Title:
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DOPED ZrO2 CAPACITOR MATERIALS AND STRUCTURES
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